微泵电磁致动器的研制与测试

本文阐述了微型机电系统领域中微泵的几种常见的致动方式及其特点。根据硅微泵的结构特点，制作出用于微型泵的电磁致动器，并对该电磁致动器进行了分析与振动测试。     

微流量系统的基础技术研究

介绍了国家自然科学基金重点资助项目”微型机械制造基础理论及基础技术研究”中“微小型泵的基础技术”及其后续工作的研究成果,并结合微流量系统研究分析了当前微型机电系统发展的几个特点,微型机电系统的重要基础课题的研究突破为其发展和应用打下基础。国际上微光机电系统技术刚走向全面发展,正是我国发展该领域的好时机。     

Research on the Fundamental Technologies of Micro Fluidic Systems

The research results of “the fundamental technologies of micropumps”, being part of the key project of “the fundamental research on the theories and technologies of micro manufacturing” supported by the National Nature Science Foundation of China, are summarized and the continued research work is also introduced in this paper. And the characteristics of microelectromechanical systems are described based on the research activities of the micro fluidic systems. Microelectromechanical systems will open up more and more applications with the breakthrough progress in the key fundamental researches. It is a chance for us to develop the field of MEMS while MEMS are just being promoted roundly in the world.