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In advancement of Pyrosil®‐technology a new kind of precursor delivery was developed, build and tested on real substrates. A Lab‐demonstrator was build to demonstrate the resources of the technology. 相似文献
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The aim of this work was to determine the principal mechanical parameters of a thin film on a substrate, i.e. Young's modulus, Poisson's ratio, intrinsic stress, and coefficient of linear thermal expansion. First, standard experiments possibly suitable for this purpose were investigated theoretically. The margin of error of the mechanical parameters determined was estimated as dependent on the geometrical conditions, substrate properties, and error in the respective measurements. In addition, the homogeneity and stability of the parameters were taken into account, for instance inhomogeneity of the film thickness and possible modification of substrate parameters during film growth. To obtain meaningful results, the accuracy of the measurements as well as the homogeneity and stability of several geometrical and physical parameters in general must be extremely high. However, the experimental conditions were found to fulfill these requirements. 相似文献
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J.-P. Han S.M. Koo E.M. Vogel E.P. Gusev C. DEmic C.A. Richter J.S. Suehle 《Microelectronics Reliability》2005,45(5-6):783
Anomalous threshold voltage roll-up behavior, commonly referred as reverse short channel effect (RSCE), has been observed in high-k (HfO2 on SiON buffer, Al2O3 on SiON buffer) gated submicron nMOSFETs, while the SiO2 or SiON control samples show normal short channel effect (SCE) behavior. The possible causes such as inhomogeneous channel doping profile and gate oxide thickness variation near S/D ends have been ruled out. The results indicate that interface trap density that dependents on channel length is the main cause of the RSCE observed here. In addition, oxide charge also plays a role. 相似文献
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Corrosion monitoring in district heating systems has traditionally been performed by using off-line methods, such as weight loss. The disadvantage is that the method is very slow, especially in low-corrosive environments, and that it only provides information about the past corrosion (accumulated over period of time). The purpose of the work is to test on-line monitoring methods in geothermal hot water in the district heating system in Reykjavik, Iceland. Geothermal water poses certain problems with regards to corrosion monitoring due to low conductivity, high pH and the presence of sulphide. These conditions make the geothermal environment low corrosive. However, a quality control is needed, especially since the sulphide causes the steel pipes to be more vulnerable towards localized corrosion. The methods used in this study were: linear polarization resistance (LPR), harmonic analysis (HA), electrochemical noise (EN) and zero resistance ammetry (ZRA). The Pitting Factor was measured with EN and showed promising results for measuring-localized corrosion on-line. A crevice corrosion cell also gave good results but had a low lifetime. However, the results of a galvanic corrosion cell (Fe/Cu) proved more difficult to interpret since they were dependent both on the dissolved oxygen and the sulphide level. 相似文献
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J Abart K Eberhardt H Fischer W Huk E Richter F Schmitt T Storch B Tomandl E Zeitler 《Canadian Metallurgical Quarterly》1997,21(4):532-538
PURPOSE: A study was performed to assess the stimulation threshold for healthy adults using sinusoidally oscillating gradients. METHOD: One hundred thirteen healthy adults were examined in the study. ECG and physiological parameters were measured. All measurements were performed of both the head and the abdomen. The subjects were measured in the supine position with the region of interest positioned in the center of the gradient coils. The measurement was performed for three orthogonal, four oblique, and double oblique orientations. RESULTS: No volunteer reported painful, severe stimulation. The mean thresholds for peripheral stimulation in head and body measurement were similar: 85.5% of stimulation during examination of the head and 87.6% during measurements of the abdomen were reported when the y-gradient was used. CONCLUSION: The greatest frequency of reported stimulations occurs when the y-gradient is used. This was confirmed by the results and supports the hypothesis that orthogonal to the y-axis the body has its largest conductive loop, resulting in the strongest peripheral stimulation. 相似文献
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O K?lbl K Bratengeier S Richter R Henkel R Schmidt M Flentje 《Canadian Metallurgical Quarterly》1997,173(10):513-518
PURPOSE: There are different techniques of boost irradiation in the treatment of patients with anal carcinoma. A new system of applicators is presented, which can be used for an intracavitary afterloading therapy. MATERIAL AND METHODS: Three different applicators are available, the first with a central catheter (K1), a second with 5 semicircular fixed catheters (K2) and an eccentric shield, a third with 8 circular fixed catheters and a central shield (K3). RESULTS: The adequate choice of applicator and catheters takes into consideration the individual localisation and extension of anal carcinoma in planning therapy. Thus, in circular growing tumors, an irradiation of the whole circumference of the anal canal is possible. In non-circular growing tumors, the dose applied in the non-affected part of the anal canal can be reduced to a quarter of the dose applied at the tumor. CONCLUSION: The new system of intracavitary afterloading therapy is a good alternative to previous techniques of boost irradiation in the treatment of anal carcinoma. By means of this technique, irradiation can be highly individualized, the tumor better included and non-affected sections of the anal canal saved. 相似文献
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Zusammenfassung Die Entwicklung der Dampfkraftanlagen zu immer h?heren Temperaturen, Drücken und Leistungen zwingt den Rohrleitungsbauer,
sich noch eingehender als bisher mit den Fragen der Elastizit?t, der Beanspruchung und der Festigkeit der Rohrleitung zu besch?ftigen.
Zu einigen der wesentlichen Fragen werden im folgenden rechnerische und experimentelle Beitr?ge mitgeteilt.
VDI 相似文献