Defocusing image to pattern contact holes using attenuated phase shift masks

The patterning of contact holes by selecting out-of-focus image plane (defocus) using attenuated phase shift masks (APSM) has been studied. Defocus is found to enhance the image modulation at low partial coherence for contact holes with negative local average of mask function. Semi-dense holes up to 130 nm in 8% APSM have been printed by 0.5 μm defocus at a partial coherence of 0.31 using KrF scanner with highest numerical aperture of 0.68. However, these holes were closed with in-focus imaging. Defocus is also found to be beneficial for patterning the pitches that have extensive side lobes with in-focus imaging.     

用仿真工具优化车辆动力系统(一)

在本文的第一部分，介绍了一种理想的车辆动力系统的计算机辅助开发过程。它显示了现代仿真技术在产品持续发展过程中的作用，该技术采用硬件回路作非在线的仿真，并通过现代化的试验手段对车辆进行匹配。特别重要的是提供了将电控变速器和发动机控制单元综合的可能性。接着是在线仿真在诸如发动机和变速器模式方面的应用和发展，它是上述开发过程的基础。根据上述的方法论，本文论述了仿真技术已取得的成绩和将来的应用可能性。     

Frequency domain identification of Wiener models

This paper proposes a frequency domain algorithm for Wiener model identifications based on exploring the fundamental frequency and harmonics generated by the unknown nonlinearity. The convergence of the algorithm is established in the presence of white noise. No a priori knowledge of the structure of the nonlinearity is required and the linear part can be nonparametric.     

Complete mobile email management

Years have lapsed since the inauguration of the first Wireless Application Protocol (WAP) application. One of the main reasons for the lukewarm response so far may be attributed to the lack of a “Killer” application. Many companies and developers have attempted to replicate email services (an Internet Killer appplication) within the WAP realm, but till now, no significant success has been reported. This paper will first discuss on the key functions which are lacking in the present WAP-email service, and which are arguably necessary if a much larger user base is to be attracted to these services. A new system will be proposed which can enable the user to send files residing in a remote personal computer (PC) as attachments to his emails using WAP-enabled mobile devices. The implementation of the system will be presented in details. Issue relating to the connection to various types of email servers and the security of the system will also be addressed in the paper.     

美国西雅图先锋广场历史保护区的形成

考察美国西雅图先锋广场历史保护区形成的过程,可以看出城市历史文化遗存的保护是经济与历史文化合力作用的结果,公众参与在城市历史文化保护工作中发挥着重要的作用。我国城市经济高速发展,保护与发展的矛盾冲突还没得到很好解决,先锋广场的例子对我们具有一定的参考价值。     

Interaction bounds in multivariable control systems

Time-domain limitations due to right half-plane zeros and poles in linear multivariable control systems are studied. Lower bounds on the interaction are derived. They show not only how the location of zeros and poles are critical in multivariable systems, but also how the zero and pole directions influence the performance. The results are illustrated on the quadruple-tank process, which is a new multivariable laboratory process.