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Morelle Christophe Théron Didier Derluyn Joff Degroote Stefan Germain Marianne Zhang Victor Buchaillot Lionel Grimbert Bertrand Tilmant Pascal Vaurette François Roch-Jeune Isabelle Brandli Virginie Avramovic Vanessa Okada Etienne Faucher Marc 《Microsystem Technologies》2018,24(1):371-377
Microsystem Technologies - Starting from Gallium Nitride epitaxially grown on silicon, pre-stressed micro-resonators with integrated piezoelectric transducers have been designed, fabricated, and... 相似文献
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