Defocusing image to pattern contact holes using attenuated phase shift masks

The patterning of contact holes by selecting out-of-focus image plane (defocus) using attenuated phase shift masks (APSM) has been studied. Defocus is found to enhance the image modulation at low partial coherence for contact holes with negative local average of mask function. Semi-dense holes up to 130 nm in 8% APSM have been printed by 0.5 μm defocus at a partial coherence of 0.31 using KrF scanner with highest numerical aperture of 0.68. However, these holes were closed with in-focus imaging. Defocus is also found to be beneficial for patterning the pitches that have extensive side lobes with in-focus imaging.     

Un nouveau regard sur la société virtuelle

The importance of rigorous research into the actual impact of the new Information and Communication Technologies (icts) on society in general cannot be overemphasised. The answer to questions concerning the precise effect ofiCTs on interpersonal relations, communication, social inclusion and exclusion, trust and identity are now central to discussion in both commercial and business fora. This paper examines the concept of the “virtual society“ in the light of the findings of the ESRC (Economic and Social Research Council) Virtual Society? Programme (1997–2002). The paper describes the need to rethink the actual approaches used in researching this area of social science at the same time as performing the analyses themselves. The author also highlights the requirement for future research to examine actual on the ground experiences. How are new technologies actually used and by whom? In addition, the author utilises his overview of this large body of research to put forward a useful guide for predicting the use of ICTs in practice. These “5 rules of virtuality” serve as pointers to the experiences that may be encountered in the development and implementation of new technologies.     

Adaptive motion control using neural network approximations

In this paper, we present a new adaptive technique for tracking control of mechanical systems in the presence of friction and periodic disturbances. Radial Basis Functions (RBFs) are used to compensate for the effects of nonlinearly occurring parameters in the friction and periodic disturbance model. Theoretical analysis, such as stability and transient performance, is provided. Furthermore, the performance of the adaptive RBF controller and its non-adaptive counterpart are compared.     

WiMedia UWB 技术追踪

采用WiMedia UWB标准的越来越多 WiMedia通用无线电平台是实现传输速率高达480Mb／s（更高的传输速率正在开发中）无线个人局域网（WPAN）的基础。这个平台并不局限于某一类应用，而是允许同时存在不同的协议适配层，如图1所示。WiMedia规范既规定了一些如无线USB之间相互通信的应用，也规定其他不相互通信的接口同时存在的应用。     

Cryptosporidium Log-inactivation with Ozone Using Effluent CT10, Geometric Mean CT10, Extended Integrated CT10 and Extended CSTR Calculations

The draft Long-Term 2 Enhanced Surface Water Treatment Rule (LT2ESWTR) contains Cryptosporidium log-inactivation CT tables (ozone-in-water concentration [residual], “C” times contact time, T). Depending on water temperature, Cryptosporidium CT values that are listed are 15 to 25 times greater than CT values for equivalent Giardia log-inactivation credit. The elevated operating dose required for Cryptosporidium log-inactivation credit has the potential to increase disinfection by-product (DBP) formation (e.g., bromate). Calculating CT value accurately will minimize ozone dose, which will decrease operating cost and lower DBP formation, and at the same time maintain disinfection protection through implementation of scientifically based safety factors. Various methods are available for calculating CT value. The method chosen depends largely on the available information concerning ozone residual characteristics and hydrodynamic features of the ozone contactor, plus local regulatory requirements. Four methods are discussed in this paper. Each method can be used to calculate Giardia, virus, and Cryptosporidium log-inactivation credit.