Formation of low-resistivity poly-Si and SiNx films by Cat-CVD for ULSI application

In this paper, bulk-Si metal–oxide–semiconductor field effect transistors (MOSFETs) are fabricated using the catalytic chemical vapor deposition (Cat-CVD) method as an alternative technology to the conventional high-temperature thermal chemical vapor deposition. Particularly, formation of low-resistivity phosphorus (P)-doped poly-Si films is attempted by using Cat-CVD-deposited amorphous silicon (a-Si) films and successive rapid thermal annealing (RTA) of them. Even after RTA processes, neither peeling nor bubbling are observed, since hydrogen contents in Cat-CVD a-Si films can be as low as 1.1%. Both the crystallization and low resistivity of 0.004 Ω·cm are realized by RTA at 1000 °C for only 5 s. It is also revealed that Cat-CVD SiN_x films prepared at 250 °C show excellent oxidation resistance, when the thickness of films is larger than approximately 10 nm for wet O₂ oxidation at 1100 °C. It is found that the thickness required to stop oxygen penetration is equivalent to that for thermal CVD SiN_x prepared at 750 °C. Finally, complementary MOSFETs (CMOSs) of single-crystalline Si were fabricated by using Cat-CVD poly-Si for gate electrodes and SiN_x films for masks of local oxidation of silicon (LOCOS). At 3.3 V operation, less than 1.0 pA μm⁻¹ of OFF leakage current and ON/OFF ratio of 10⁷–10⁸ are realized, i.e. the devices can operate similarly to conventional thermal CVD process.     

Two complementary operations inspired by the DNA hairpin formation: Completion and reduction

We consider two complementary operations: Hairpin completion introduced in [D. Cheptea, C. Martin-Vide, V. Mitrana, A new operation on words suggested by DNA biochemistry: Hairpin completion, in: Proc. Transgressive Computing, 2006, pp. 216–228] with motivations coming from DNA biochemistry and hairpin reduction as the inverse operation of the hairpin completion. Both operations are viewed here as formal operations on words and languages. We settle the closure properties of the classes of regular and linear context-free languages under hairpin completion in comparison with hairpin reduction. While the class of linear context-free languages is exactly the weak-code image of the class of the hairpin completion of regular languages, rather surprisingly, the weak-code image of the class of the hairpin completion of linear context-free languages is a class of mildly context-sensitive languages. The closure properties with respect to the hairpin reduction of some time and space complexity classes are also studied. We show that the factors found in the general cases are not necessary for regular and context-free languages. This part of the paper completes the results given in the earlier paper, where a similar investigation was made for hairpin completion. Finally, we briefly discuss the iterated variants of these operations.     

On the computational power of insertion-deletion systems

Gene insertion and deletion are basic phenomena found in DNA processing or RNA editing in molecular biology. The genetic mechanism and development based on these evolutionary transformations have been formulated as a formal system with two operations of insertion and deletion, called insertion-deletion systems (Kari and Thierrin, 1996; Kari et al., 1997).We investigate the generative power of insertion-deletion systems (InsDel systems), and show that the family INS ¹ ₁ DEL ¹ ₁ is equal to the family of recursively enumerable languages. This gives a positive answer to an open problem posed in Kari et al. (1997) where it was conjectured contrary. This revised version was published online in June 2006 with corrections to the Cover Date.     

A pregnancy-specific glycoprotein is expressed in the brain and serves as a receptor for mouse hepatitis virus

Mouse hepatitis virus (MHV), a murine coronavirus known to cause encephalitis and demyelination, uses murine homologues of carcinoembryonic antigens as receptors. However, the expression of these receptors is extremely low in the brain. By low-stringency screening of a mouse brain cDNA library, we have identified a member of the pregnancy-specific glycoprotein (PSG) subgroup of the carcinoembryonic antigen gene family. Unlike other PSG that are expressed in the placenta, it is expressed predominantly in the brain. Transfection of the cDNA into COS-7 cells, which lack a functional MHV receptor, conferred susceptibility to infection by some MHV strains, including A59, MHV-2, and MHV-3, but not JHM. Thus, this is a virus strain-specific receptor. The detection of multiple receptors for MHV suggests the flexibility of this virus in receptor utilization. The identification of this virus in receptor utilization. The identification of a PSG predominantly expressed in the brain also expands the potential functions of these molecules.     

Electrostatic probe measurement in an industrial furnace for high-temperature air conditions

Electrostatic probe measurements are reported that identify flame location, displacement speeds of reaction region, and other flame properties within an industrial furnace that is operated with high-temperature preheated air. The electrostatic probe has advantages over other methods when a furnace is operated with high-temperature air. The probe consisted of a fine detection wire and a supporting tube that played a role of the reference electrode. The reaction regions were found to be widely dispersed and weakened as they moved downstream. However, the ion-current signals still included many sharp peaks, perhaps associated with the thin reaction thickness, contrary to the flame structure expected from the high-temperature air combustion. It was also possible to estimate the displacement speeds of reaction region by using the cross-correlation method between two ion current records detected by parallel detection components. The results demonstrate that the electrostatic probe is useful to detect the structure and state of the reaction mode in industrial furnaces even in the presence of high-temperature air combustion.