Automated and Continuous Production of Microstructured Metallic Plates via Cold Embossing

Many critical issues need to be addressed when microstructured reactors are manufactured in large unit volumes. The most crucial of these are cost, ease of production, and reliability. The lack of breakthrough manufacturing technology to provide high‐efficiency, low‐cost, high‐precision plates is a hindrance to the early market implementation of systems requiring metallic microstructured plates. This contribution focuses on the development and optimization of a combined embossing and bending tool for the quick and continuous manufacture of easily machined plates.     

Micromachined silicon bolometers as detectors of soft X-ray, ultraviolet, visible and infrared radiation

This paper presents the development of micromachined thin-film silicon microbolometers which can be used for detection of soft X-ray, UV, visible and infrared radiation. The detector structure is a 1 μm thick polysilicon/Si₃N₄ membrane suspended over a cavity. This structure has been obtained by anisotropic etching of silicon with a previously deposited polysilicon/Si₃N₄ sandwich. Alternatively, porous silicon has been used as the sacrificial layer. Devices have been characterized. Good values of the voltage responsivity and detectivity have been obtained.     

Creation of Ultra-precision Microstructures with High Aspect Ratios

In recent years, ultra-precision micromachining technology has been used in a variety of fields such as optical instruments, electronic devices, medical equipments, etc. At present, it is essential to meet the requirement of producing various shapes, one of which is a structure with a high aspect ratio. Such structures are applied, for example, to a shaft of micro robot, a long part of microactuator and micromachine, a microneedle for syringe, etc. However, due to its fragile nature, it is extremely difficult to fabricate the structure with a high aspect ratio since it is easily damaged during cutting. It is intended to produce micro towers with high aspect ratios by applying the ultra-precision milling technology using a single crystal diamond cutting tool. The method enables accurate creation of a variety of microstructures with high aspect ratios. In addition, the study also proposes a new machining method to create microneedle arrays, avoiding the contact of cutting edge with already machined parts again. As a result, it is concluded that the proposed method has the potential of producing a variety of microstructures with high aspect ratios.     

EDM-Lathe for Micromachining

In this paper a new type of micro-EDM machine is proposed. The machine operates similarly to a turning lathe. An electrode fabrication system is installed which makes it possible to fabricate on-the-machine complex microelectrodes with sharp edges and corners. A prototype set of equipment was realized and test machining proved that a machine of this type can produce microcylindrical, overhung cavities, or cylindrical microholes with larger internal diameters than the entrance diameter. This result reveals the possibility of fabrication of various microparts such as microball bearings.     

Electrochemical micromachining of nitinol by confined-etchant-layer technique

The confined etchant layer technique has been applied to fabricate complex three-dimensional microstructures on nitinol for the first time. HF and HNO₃ were locally and simultaneously electrogenerated at the mold surface to etch a nitinol workpiece. NaOH was used as an efficient scavenger to confine the etchant close to the mold. Cyclic voltammetry was employed to study the electrochemical behavior of a Pt electrode in the etching solution in order to choose an appropriate potential for etchant generation on the mold. The thickness of the confined etchant layer was estimated to be several micrometers by inspecting the deviation of the sizes of the etched spots from the sizes of those on the microelectrode. Thus, the composition of the electrolyte could be optimized for better etching precision. By optimizing the composition of the electrolyte, complex microstructures on a Pt-Ir mold bearing the logo “XMU” of Xiamen University were successfully fabricated on nitinol. The etched patterns were approximately negative copies of the mold, and the precision of duplication could easily reach the micrometer scale.     

Micromachined sol–gel carbon nanotube/SnO2 nanocomposite hydrogen sensor

A novel micromachined single wall carbon nanotube (SWCNT) reinforced nanocrystalline tin dioxide gas sensor has been developed. The presence of SWCNT in SnO₂ matrix was realized by a spin-on sol–gel process. The SWCNT/SnO₂ sensor's sensitivity for hydrogen detection has greatly increased by a factor of three, in comparison to that of pure SnO₂ sensor. The novel sensor also lowers the working temperature, response time and recovery time. The greatly improved performances are mainly attributed to the effective gas accessing nano passes through SWCNT plus the smaller distance between adjacent gas accessing boundaries formed by the distribution of tiny SWCNTs. Therefore, both the spatial requirement (D ≤ 2L, D is the distance between adjacent gas accessing boundaries and L is the space charge layer thickness) and surficial requirement (adequate gas activation area) are met and the maximum inherent sensitivity of SnO₂ is achieved.     

A study of heat distribution and dissipation in a micromachined chemoresistive gas sensor

A micromachined chemoresistive gas sensor was studied from the point of view of heat distribution and thermal dissipation: this innovative device for environmental pollutant gas monitoring, is based on a sensitive film of semiconductor metal oxides, kept in temperature by a platinum resistor. In order to avoid electrical interactions between the film heater and the contacts for the film reading, the heater is driven by a square wave, and the film is read when no voltage is provided. Since the working temperature of the film is extremely important for its operation, it is crucial to maintain the temperature fluctuations within few degrees; to this end, in this work we study the heat distribution and dissipation of such a device, aiming to set a proper heating frequency, which will assure a right stability of the working temperature.     

Capacitive micromachined ultrasonic transducer (CMUT) arrays for medical imaging

Capacitive micromachined ultrasonic transducers (CMUTs) bring the fabrication technology of standard integrated circuits into the field of ultrasound medical imaging. This unique property, combined with the inherent advantages of CMUTs in terms of increased bandwidth and suitability for new imaging modalities and high frequency applications, have indicated these devices as new generation arrays for acoustic imaging. The advances in microfabrication have made possible to fabricate, in few years, silicon-based electrostatic transducers competing in performance with the piezoelectric transducers. This paper summarizes the fabrication, design, modeling, and characterization of 1D CMUT linear arrays for medical imaging, established in our laboratories during the past 3 years. Although the viability of our CMUT technology for applications in diagnostic echographic imaging is demonstrated, the whole process from silicon die to final probe is not fully mature yet for successful practical applications.     

一种新型硅电容式流速流向传感器的设计

设计了一种基于体微机械加工技术的新型硅电容式流速流向传感器.这种传感器由圆柱型阻流体和支撑梁构成,这种结构将流体的流速流向信息转化为阻流体的位移,通过四组正交电容来测量位移,从而得到流体的流速和流向.理论计算了传感器的结构尺寸并利用有限元分析方法计算了传感器的电容输出.