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A planar voltammetric sensor array for use in an electronic tongue was fabricated using a combination of microfabrication techniques. The techniques of e-beam evaporation and pulsed laser deposition were applied to prepare a device that contained all of the electrodes integrated on a silicon die (6 mm × 6 mm). The working electrodes were metals gold, platinum, iridium and rhodium. They were characterized by SEM and EDX, and by electrochemical investigation of the packaged dies with cyclic voltammetry in solutions of sulfuric acid and of ferrocene carboxylic acid in aqueous buffer solution. The robustness and reproducibility of the devices were assessed by potential cycling in acid solution. 相似文献
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本文着重论述了田口式参数设计法在半导体制造中对线宽的质量控制.通过田口式参数设计法,可以优化线宽控制对光刻过程步骤中的可控参数的条件,以便将不可控因素的影响降到最低. 相似文献
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This paper describes a template-assisted method that combines the advantages of photolithography and electrochemical synthesis to construct a wafer-scale Au flower-like structure microarray. The detailed information about the effect of concentration of electrolyte, pattern of template substrate, applied potential, and surfactant on the formation of Au flower-like microarray is investigated. The possibility of using such a microarray as electrodes for their electrochemical properties is also tested by CV experiments. 相似文献
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本文介绍了利用现有5μm工艺设备进行1~2μm窄条的光刻技术,着重对光刻SiO_2窄条和金属连线方面作了具体的介绍。对优化的“发射区两次错位光刻”和“多晶发射极自对准”工艺技术作了较详细的叙述。 相似文献
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《Organic Electronics》2014,15(8):1822-1827
A patterning scheme for poly(3,4-ethylenedioxythio-phene):poly(styrenesulfonate) (PEDOT:PSS) is reported. With a silver interlayer, the conductive PEDOT:PSS film can be patterned down to micrometer scales by traditional photolithography, and this patterning scheme can be applied on large-area flexible substrates. Through systematical investigations, the patterning processes have no obvious influence on both the bulk and surface properties of PEDOT:PSS films. Efficient organic light emitting diodes (OLEDs) are realized based on this patterned PEDOT:PSS anode, and they show comparable performance to those devices with an indium tin oxide (ITO) anode. High-resolution OLED pixel arrays are also demonstrated. Our interlayer approach here has an advantage of patterning PEDOT:PSS with high resolution and large scale, and it is also compatible with traditional photolithographic processes which substantially save the capital cost. Results indicate that the photographically patterned conductive PEDOT:PSS film becomes a promising candidate for eletrical eletrode material in organic electronic applications. 相似文献
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Pawel E. Malinowski Atsushi Nakamura Dimitri Janssen Yoshitaka Kamochi Ichiro Koyama Yu Iwai Anna Stefaniuk Ewelina Wilenska Caterin Salas Redondo David Cheyns Soeren Steudel Paul Heremans 《Organic Electronics》2014,15(10):2355-2359
We report on the fabrication of organic photodetectors (OPD) based on isolated islands of P3HT:PCBM. Pattern transfer to the active material was done with photolithography based on non-fluorinated solvents and the excessive organic semiconductor was removed with oxygen plasma reactive ion etching. The photoresist system used was found to be benign to the P3HT:PCBM layer as confirmed by absorption, thickness and roughness measurements. Current–voltage characteristics and external quantum efficiency (EQE) remained unchanged after the patterning process. It was demonstrated that it is possible to photolithographically pattern isolated islands with 200 μm edge length with the same dark current density (<10−5 A/cm2 at −2 V bias voltage) and photocurrent density (>5 × 10−3 A/cm2 at −2 V). Furthermore, concerning the solar cell performance, the patterned, small-area devices showed power conversion efficiency of 2.1% and fill-factor of 60%. Dark current was observed to depend on the size of the remaining semiconductor island, which was demonstrated on OPDs with diameter of 50 μm. The presented results show the feasibility of fabrication of isolated devices based on organic semiconductors patterned with non-fluorinated photolithography. 相似文献