X射线干涉光刻光束线关键光学元件热-结构耦合分析

为了保证上海光源X射线干涉光刻光束线的稳定性,减小热变形对实验结果的影响,对X射线干涉光刻光束线的3个关键光学元件——偏转镜、聚焦镜和精密四刀狭缝进行热-结构耦合分析。首先,计算偏转镜、聚焦镜和精密四刀狭缝所承载的功率密度;然后,建立其有限元模型;最后,获得光学元件的温度场和热变形的结果。结果表明,偏转镜和聚焦镜采用间接水冷方式可有效抑制热变形,冷却后的最大面形误差分别为7.2μrad和9.2μrad。精密四刀狭缝未冷却时,刀片组件温度介于271.56~273.27℃,刀口热变形为0.19 mm,直线导轨热变形为0.08 mm;经过铜辫子冷却后,刀片组件温度降至22.24~23.94℃,刀口热变形降至0.2μm,直线导轨热变形降至0.1μm;采用影像法和接触探头法测试后,刀口直线度、平行度和重复精度均满足技术要求。偏转镜、聚焦镜和精密四刀狭缝的热变形通过间接水冷和铜辫子的冷却方式可以得到很大程度的抑制,进而保证光斑质量。     

激光晶体Nd:YVO4的形貌及生长缺陷

本文报道了应用环境扫描电镜（ESEM）和同步辐射X射线白光形貌术对采用提拉法生长出的Nd:YVO4晶体进行的形貌及生长缺陷的分析,获得了该晶体的开裂表面的ESEM形貌像以及取自晶体肩部和中间部位的（001）面的同步辐射白光形貌像,观察到了位错、包裹物等缺陷,可为生长高质量的Nd:YVO4晶体提供重要的启示.     

Fast microwave detection system for coherent synchrotron radiation study at KEK: Accelerator test facility

A fast room temperature microwave detection system based on the Schottky Barrier-diode detector was created at the KEK ATF (Accelerator Test Facility). It was tested using Coherent Synchrotron Radiation (CSR) generated by the 1.28 GeV electron beam in the damping ring. The speed performance of the detection system was checked by observing the CSR from a multi-bunch (2.8 ns bunch separation time) beam. The theoretical estimations of CSR power yield from an edge of bending magnet as well as new injection tuning method are presented. A very high sensitivity of CSR power yield to the longitudinal electron distribution in a bunch is discussed.     

同步辐射x射线光刻制作深亚微米T形栅

x射线光刻非常适合用于深亚微米T形栅的制作,这是因为它的高分辨率、大的曝光视场和高的生产效率足以满足MMIC制造工艺的要求。本文中我们首先对我们的x射线掩模制造工艺进行介绍,然后论述了一种用于制造深亚微米T形栅的两层胶工艺,介绍了所取得的一些研究结果,最后对国内的深亚微米光刻现状进行了简要分析。     

同步辐射光刻技术

同步辐射光刻有希望代替传统光刻技术,用于0.25μm以下图形的超精细加工。本文叙述了它的原理、相关技术的开发现状和工艺应用。     

Mesomorphism of Lanthanide(Ⅲ) 4-Hexyloxybenzoates

The 4-alkoxybenzoic acids are well-known liquid crystals showing several mesophases(nematic,smectic C phase or both)depending on the alkoxy chain length and whereby the rigid core of the mesogen is formed by intermolecular hydrogen bonds.In this paper it is shown that the thermal behaviour of lanthanide salts of 4-hexyloxybenzoic acids depends on the lanthanide ion(Ln=La,Pr,Nd,Sm,Eu).The lanthanum(Ⅲ)and praseodymium(Ⅲ)4-hexyloxybenzoates exhibit a smectic A mesophase.No mesophase is found for the corresponding compounds of heavier lanthanides.The thermal properties of the lanthanide(Ⅲ)4-hexyloxybenzoates were investigated by differential scanning calorimetry(DSC),polarising thermo-optical microscopy and synchrotron X-ray radiation.     

X-ray spectroscopy and local structures in glasses

X-ray spectroscopy which is a combination of two techniques, namely x-ray absorption near edge structure (xanes) and extended x-ray absorption fine structure (EXAFS) analyses, is a unique technique for the study of local structures in glasses. Availability of synchrotron radiation sources has made the technique quite attractive and useful because the photon flux from synchrotrons is very intense and polarized. In this article, a brief summary ofxanes andEXAFS techniques is given along with a few applications to the study of local structures in glasses. Communication No. 323 from Solid State and Structural Chemistry Unit.     

Anionic Clays as Potential Slow-Release Fertilizers: Nitrate Ion Exchange

Several nitrate containing anionic clays were synthesized at different temperatures and the kinetics of NO₃ ^– release were determined to test their suitability as slow-release N fertilizers. A sample (Mg:Al = 2:1) synthesized at 60°C with smaller particle size released 75, 86 and 100% of its NO₃ ^– in 1, 3 and 7 days, respectively when equilibrated with a simulated soil solution. On the other hand, the 175°C/2 hrs sample with larger particle size released 65, 77 and 84% of its nitrate in 1, 3 and 7 days, respectively. Another anionic clay (synthesized at 175°C/24 hrs) of higher charge density (Mg:Al = 2:1) containing NO₃ ^– was equilibrated with a 0.012 N NaCl or Na₂CO₃ to test the role of different anions in releasing the NO₃ ^– anion from the interlayers. The results showed that Cl^– released more NO₃ ^– than did CO₃ ^2– from this anionic clay after all the treatment times probably as a result of the CO₃ ^2– anion blocking the release of NO₃ ^– from the interior of the crystals. When a lower charge density (Mg:Al = 3:1) sample (synthesized at 175°C/48 hrs) was equilibrated with 0.02N solution of anions the release of nitrate was as follows: Cl^– < F^– < SO₄ ⁼ CO₃ ^2–. These results suggest that the divalent SO₄ ⁼ and CO₃ ^2– anions are more effective in the release of NO₃ ^– from this lower charge density anionic clay. Time-resolved structural analysis of NO₃ ^– exchange with CO₃ ^2– in the above anionic clay using synchrotron x-ray diffraction showed that ion exchange is rapid because of small crystal size and lower charge density. Thus the release of NO₃ ^– from anionic clays is an interplay among the type of anions present in soil solution, their concentration, pH of soil solution, the charge density and crystal size of anionic clay etc.     

Systematic study of structure and piezoelectric properties of Pb(Ni1/3Nb2/3)O3-PbTiO3 by in situ synchrotron diffraction

Lead-based ferroelectric materials are extensively employed in industrial applications and everyday life due to their excellent ferroelectric and piezoelectric performance. Pb(Ni_1/3Nb_2/3)O₃-PbTiO₃ (PNN-PT) is a typical binary relaxor ferroelectric system, whose refined structure and piezoelectric properties have not been systematically investigated. In this study, evolution of electric field-based crystal structure and variation of ferroelectric, piezoelectric, as well as dielectric properties with composition and temperature of (1 − x)PNN-xPT (0.32 ≤ x ≤ 0.36) ceramics were studied in full detail. The optimal performance is obtained at 0.66PNN-0.34PT with maximum piezoelectric coefficient d₃₃ of 560 pC/N and large dielectric constant of 28 684. In situ high-energy synchrotron diffraction was employed to determine structural origins of enhanced properties of 0.66PNN-0.34PT. Interestingly, crystal structure of poled 0.66PNN-0.34PT ceramic is determined to be single monoclinic phase. Furthermore, both its lattice parameters and volume variation present butterfly shape under electric field. It is demonstrated that macroscopic strain of 0.66PNN-0.34PT stems mainly from intrinsic structure. The present study provides evidence for the relationship between microstructure and macroscopic properties, which is beneficial to the design of new materials with piezoelectric properties.     

CAE在同步辐射装置挡光元件设计中的应用

针对第三代同步辐射装置挡光元件承受极高热负载、设计难度大的问题,综述CAE在其设计中的应用情况:借助有限元分析可以获得挡光元件关键部件吸收体的最高温度和最大应力这两个最主要设计参数;通过计算流体力学(Computational Fluid Dynamics,CFD)软件模拟可以获得吸收体中冷却管道的对流换热与流动阻力特性参数;采用热弹塑性有限元分析可以获得用于低周疲劳寿命预估的吸收体热应力应变迟滞循环.下一步工作将围绕当今研究的核心问题——基于低周疲劳的设计准则展开,包括同步辐射高热负载作用下低周疲劳裂纹的起裂寿命和扩展寿命预测,以及吸收体倾角、表面光滑度、冷却管道排布等对寿命的影响.这些研究均需要充分利用CAE的强大分析功能.