离子束辅助沉积对TiAlSiN薄膜性能的影响

分别利用真空电弧沉积技术与等离子体辅助真空电弧沉积技术在不锈钢片、高速钢片和单晶硅片上沉积TiAlSiN多元薄膜，通过X射线衍射和扫描电镜对采用两种方法制备的薄膜物相及表面形貌进行了分析比较，测定了高速钢片上薄膜的显微硬度，进行了耐磨性实验。结果表明，采用离子束辅助沉积制备的薄膜，有（200）面的择优取向，薄膜的表面形貌得到改善，硬度和耐磨性提高。     

Si含量对多元等离子体浸没离子注入与沉积技术制备TiAlSiN涂层微结构和机械性能的影响(英文)

采用多元等离子体浸没离子注入与沉积制备TiAlSiN纳米复合涂层,利用EDX,XRD,SEM,XPS,纳米探针和划痕试验对涂层成分组成、微结构和机械性能进行测试分析。XRD测试表明,TiAlSiN涂层具有较强的TiN(200)择优取向。XPS测试表明,TiAlSiN涂层中也含有AlN、Si3N4、Al2O3和Ti2O3。与制备的TiN涂层相比,当涂层中的Si含量为0.9%时,TiAlSiN涂层表现出较高的硬度,达32GPa,但涂层的断裂韧性和结合强度较低;当涂层中的Si含量增加至6.0%时,TiAlSiN涂层具有超高的硬度57GPa,并表现出较好的断裂韧性和结合强度。     

Wear behavior of HPPMS deposited (Ti,Al,Si)N coating under impact loading

Over the last decade the interest in High Power Pulse Magnetron Sputtering (HPPMS) and High impulse Magnetron Sputtering (HiPIMS) has undergone a considerable increase. This is mainly due to the fact that several researchers have shown that in these processes a distinct increase of the ionization of deposition species is observable. However, there is only little known about the performance of these films with regard to applications. Recently Hovsepian et al. [1] and Bobzin et al. [2] presented cutting results of different films. Both authors show that films deposited using HPPMS or HiPIMS outperform state‐of‐the‐art coatings. Depending on the cutting process, besides hardness and adhesion also excellent impact behavior is required. Therefore this work deals with the impact behavior of (Ti,Al,Si)N which was deposited using HPPMS for the application in interrupted cutting process. The impact behavior of HPPMS coating under normal and tangential loads is analyzed. During impact tests number of impacts, loads and inclination angle of the samples with regard to the load direction are varied. (Ti,Al,Si)N shows an excellent endurance even at very high loads causing Hertzian stresses in the range of 10–13 GPa. At an inclination angle of 10° and an impact load of 100 N, which corresponds to app. 10 GPa initial Hertzian stress, no damage was observed after 800×10³ impacts.     

High temperature tribological characterisation of TiAlSiN coatings produced by cathodic arc evaporation

This study reports on the wear properties at medium-high temperatures of TiAlSiN films deposited by cathodic arc evaporation on hot work steel substrates. The chemical composition and microstructure of the coatings were characterised by glow discharge optical emission spectroscopy, scanning electron microscopy and X-ray diffraction. The mechanical properties, i.e. hardness and elastic modulus were evaluated by nanoindentation, and the adhesion of the coatings was tested by scratch tests. Coatings with stoichiometries of Ti_0.31Al_0.1Si_0.06N_0.53 and Ti_0.23Al_0.12Si_0.09N_0.55 exhibit microstructures consisting of solid solutions of (Ti,Al,Si)N, where Al and Si replace Ti atoms. These films show high hardness and good adhesion strength to the hot work steels. Conversely, coatings with a stoichiometry of Ti_0.09Al_0.34Si_0.02N_0.55 show a wurtzite-like microstructure, low hardness and poor adhesion strength.The wear rates of the coatings were investigated by ball-on-disc experiments at room temperature, 200 °C, 400 °C and 600 °C, using alumina balls as counter surfaces. At room temperature, the films show wear rates of the same order of magnitude of TiN and TiAlN coatings. On the other hand, the wear rates of solid solution (Ti,Al,Si)N coatings measured at 200, and 400 °C are one order of magnitude smaller than those measured at room temperature due to the formation of oxide-containing tribofilms on the wear tracks. At 600 °C the wear rates increase but still keep smaller than those measured at room temperature, although this effect can be influenced by the softening of the steel substrates by over-tempering. EDS analyses revealed that, between 200 °C and 400 °C, the oxidation of the coating occurs only at the contact zone between the film and the counterpart body due to the sliding process.     

滚轮表面TiAlSiN涂层制备及失效机理研究

目的通过对滚轮表面制备超硬纳微米TiAlSiN涂层,提高滚轮的综合工作性能。方法采用阴极电弧离子镀膜技术在滚轮工作面及高速钢试样表面制备超硬纳微米TiAlSiN涂层。通过X射线荧光测量系统测量涂层厚度,采用扫描电子显微镜(SEM)观察涂层表面特征和形貌,采用能谱仪(EDS)对涂层元素的成分进行分析,通过纳米压痕仪及洛氏硬度计对涂层的硬度及膜基结合力进行测定和分析。结果滚轮表面1.97μm厚的TiAlSiN涂层的Si原子数分数为4.21%,其显微硬度为37.69 GPa,涂层与基体的膜基结合力符合VDI-3198工业等级的HF3,呈现出较强的膜基结合力。经生产线上滚压机实际成形加工验证,涂层后滚轮的工作寿命是未涂层滚轮的5倍,滚轮具有强度高、耐磨损、抗氧化、耐腐蚀、粘附性降低等特性,显著改善了磨损、剥落、疲劳裂纹、缠辊、粘滚等现象。结论在滚轮表面制备超硬纳微米TiAlSiN涂层,能显著提高滚轮的综合工作性能。     

真空热处理对多弧离子镀TiAlSiN涂层性能的影响

为提高TiAlSiN涂层的力学性能,研究了真空热处理对多弧离子镀TiAlSiN涂层微观组织和力学性能的影响。利用扫描电子显微镜(SEM)、X射线衍射仪(XRD)、自动划痕仪、纳米压痕仪、摩擦磨损测试仪等表征其表面形貌、物相组成和力学性能。结果表明:热处理引起了涂层的晶格畸变,降低了TiN固溶体相的平均晶格常数,导致其衍射峰向高角度偏移;热处理会粗化涂层表面,并导致TiAlSi中间过渡层界面消失。经过800℃热处理后,涂层的纳米硬度和结合力达到最大值,分别为35.01 GPa和54.45 N;涂层的平均摩擦因数最小,由热处理前的0.679降低至0.372,比热处理前下降了约45.2%。     

TiAlSiN涂层刀具研究新进展

在TiAlN涂层中添加第四组元素以提高涂层的力学性能和热稳定性已成为目前刀具涂层的前沿领域。而在这些多元涂层中,Si能显著改进(Ti,Al)N涂层的抗氧化性、热稳定性和硬度,因而引起了研究人员的极大兴趣和关注。对TiAlSiN涂层的发展过程、Si在TiAlSiN涂层中的作用、TiAlSiN涂层的制备方法以及其发展趋势做了系统介绍。     

Microstructure and tribological behavior of TiAlSiN coatings deposited by deep oscillation magnetron sputtering

Development of pulsed‐techniques aimed to generate highly ionized target species and high plasma density opens up a new way to tailor composition, structure, and properties of coatings. In this work, TiAlSiN coatings have been deposited at various negative substrate biases (V_s) using deep oscillation magnetron sputtering by sputtering a TiAlSi compound target in Ar/N₂ mixtures. The increase in V_s from ?30 to ?120 V resulted in a decrease in (111)‐preferred orientation and grain size, together with the increase in residual stress and rough morphology. The nc‐TiAlN/a‐Si₃N₄ nanocomposite structure was obtained in coatings. The highest hardness and Young's modulus reached 42.4 and 495 GPa at ?120 V, respectively. However, at ?60 V, the coatings with the highest H/E* and H³/E*² ratios of 0.095 and 0.332 exhibited excellent adhesion with above HF1 level, the lowest coefficient of friction (COF) of 0.35 and specific wear rate of 2.1 × 10^?7 mm³ N^?1 m^?1. Wear mechanism changed from the mixture of severe adhesive, oxidative and abrasive wear to mild oxidative wear to severe oxidative wear. TiAlSiN coatings with high hardness and H/E* and H³/E*² ratios exhibited the decrease in COF and wear rate due to refined grains in uniform distribution, which well promoted oxide layers formed on sliding contact surface.     

Influence of annealing temperature on microstructure evolution of TiAlSiN coating and its tribological behavior against Ti6Al4V alloys

TiAlSiN multicomponent coating, owing to its high hardness and excellent high temperature resistance, was widely used in the cutting field of difficult-to-cut materials such as titanium alloys. For machining titanium alloys, high temperature is easy to gather on the tool chips and deteriorate the cutting tools. Moreover, high temperature will also promote the microstructure evolution and make the wear mechanism more complex. In this paper, TiAlSiN coatings were deposited on cemented carbides and annealed at 400 °C, 600 °C and 800 °C respectively for 60 min in air, followed by reciprocating friction tests against Ti6Al4V counterparts. AFM, SEM, EDS and XPS were applied to investigate the microstructure evolution and tribological behavior of TiAlSiN coating after high temperature annealing. The results demonstrated that the oxidation resistance of TiN phase in TiAlSiN coating was worse than Si₃N₄ and AlN phases. These nitrides can be oxidized to TiO₂, SiO_x and AlO_x under 600 °C, and the depth of oxide layer was increased with the rising annealing temperature, resulting in the coarsened microstructure. The wear mechanisms of as-deposited TiAlSiN coating were oxidation wear and adhesion wear. With the rising annealing temperature, abrasive wear was gradually enhanced. For the TiAlSiN coating annealed at 800 °C, abrasive wear became the dominant wear mechanism.     

脉冲电弧沉积TiAlSiN涂层及其干式切削性能

为开发适于切削镍基高温合金的刀具涂层,采用脉冲电弧离子镀沉积TiAlSiN涂层,研究Si添加对TiAlN涂层耐磨性、抗氧化性及车削性能的影响。结果表明：Ti_0.45Al_0.45Si_0.10N涂层具有最高的结合力（100 N）和硬度（35 GPa）。800 ℃高温下,Ti_0.40Al_0.40Si_0.20N涂层已经磨穿,而Ti_0.50Al_0.50N和Ti_0.45Al_0.45Si_0.10N的磨损率分别为4.48×10^-6和2.65×10^-6 mm³·N^-1·m^-1;3种涂层都存在粘着磨损,其中,Ti_0.50Al_0.50N和Ti_0.45Al_0.45Si_0.10N涂层分别还发生了磨粒磨损。此外,Si的合金化显著提高了TiAlN涂层的抗氧化性。使用涂层刀具车削镍基高温合金时的寿命长短依次为Ti_0.50Al_0.50N < Ti_0.40Al_0.40Si_0.20N < Ti_0.45Al_0.45Si_0.10N。3种涂层刀具磨损形式以粘着磨损、氧化磨损及磨粒磨损为主。综上,因其优异的力学和耐磨耐氧化性能,Ti_0.45Al_0.45Si_0.10N涂层具有更好车削性能。