PECVD法低温沉积多晶硅薄膜的研究

在玻璃衬底上采用常规的PKCVD法在低温(≤400℃)条件下制得大颗较(直径＞100nm)、择优取向(220)明显的多晶硅薄膜。选用的反应气体为SiF4和H2混合气体。加入少量的SiH4后，沉积速率提高了近10倍。分析认为，在低温时促使多晶硅结构形成的反应基元应是SiFmHn(m n≤3)，而不可能是SiHn(n≤3)基团。     

Ready, Set, Go! The Voronoi diagram of moving points that start from a line

It is an outstanding open problem of computational geometry to prove a near-quadratic upper bound on the number of combinatorial changes in the Voronoi diagram of points moving at a common constant speed along linear trajectories in the plane. In this note we observe that this quantity is Θ(n²) if the points start their movement from a common line.     

Evolution of grain structure in thin film reactions

In this paper, we examine, both experimentally and theoretically, the kinetics of formation and microstructure of product phases in thin film reactions, using the Nb/Al and Ti/Al systems as our prototypes. The results of calorimetry and microscopy studies are interpreted using simple kinetic and morphology models. In particular, the kinetic models employed here focus on the nucleation and growth components of the phase formation process and the morphology models provide a starting point for the classification of product grain structures. An erratum to this article is available at .     

Polygonal extrusion

A sweeping operation called polygonal extrusion is defined to improve the modeling power of CSG-based modeling. It is assumed that a 2D cross-sectional polygon (sweeping polygon) moves in space while its containing plane is kept orthogonal to the tangent direction of the trajectory curve, a planar polygonal chain having no self-intersections. The objective of the paper is to compute the boundary of the swept volume of the sweeping polygon as a set of polygons (or triangles). The most significant challenge to accomplishing this objective is the problem of trimming the swept volume. To solve the trimming problem, 2D-curve offsetting methods are employed. Two algorithms are presented for polygonal extrusion that are based on different offsetting methods, the Voronoi diagram and PWID offset. The proposed algorithms have been implemented and tested with various examples. Published online: 28 January 2003     

Effect of epitaxial realignment on the leakage behavior of arsenic-implanted,as-deposited polycrystalline Si-on-single crystal Si diodes

When dopants are indiffused from a heavily implanted polycrystalline silicon film deposited on a silicon substrate, high thermal budget annealing can cause the interfacial “native” oxide at the polycrystalline silicon-single crystal silicon interface to break up into oxide clusters, causing epitaxial realignment of the polycrystalline silicon layer with respect to the silicon substrate. Anomalous transient enhanced diffusion occurs during epitaxial realignment and this has adverse effects on the leakage characteristics of the shallow junctions formed in the silicon substrate using this technique. The degradation in the leakage current is mainly due to increased generation-recombination in the depletion region because of defect injection from the interface.     

PDC钻头在胜利油田深井钻井中的应用

胜利油田为提高深井钻井速度，试验应用了PDC钻头，结果表明，深井钻井应用PDC钻头可大幅度提高机械钻速，缩短建井周期，降低钻井成本，经济效益明显。通过大量的现场试验，扩大了PDC钻头在胜利油田的使用范围，并取得很好的效果，初步形成了PDC钻头推广应用区域模式。详细介绍了胜利油田不适用PDC钻头钻进的地层岩性，给出了钻头选型及钻井参数选择原则，并对应用效果进行了分析。     

无线传感网络覆盖中概率Voronoi模型及算法研究

覆盖是无线传感网络中最重要的问题之一,随机覆盖是目前研究的主流。基于Voronoi图的随机覆盖算法是无线传感网络领域的研究热点。目前研究中采用的Voronoi图,主要采用基于距离的Voronoi边赋权值模型,存在两个主要问题,即模型粗糙和监测节点不全。以实测的分段概率传感模型为基础,从多传感协同监测的角度构造一种概率Voronoi模型,试图解决以上问题。并且用基于概率Voronoi模型的最大突破路径算法验证了模型有效性。就掌握的文献来看,该模型是首次提出,具有较好的实用推广价值。     

A comparative study of transient waves in random (polycrystalline) media

The paper investigates the transient response of a random medium as predicted by two methods, a perturbation scheme and a causal approach. It is shown by direct computation of a pulse propagation that the perturbation scheme yields an advanced response inconsistent with the physical realizability of the medium. The causal model as well as a modified perturbation scheme exhibit a physically reasonable behavior.     

A faster divide-and-conquer algorithm for constructing delaunay triangulations

An easily implemented modification to the divide-and-conquer algorithm for computing the Delaunay triangulation ofn sites in the plane is presented. The change reduces its (n logn) expected running time toO(n log logn) for a large class of distributions that includes the uniform distribution in the unit square. Experimental evidence presented demonstrates that the modified algorithm performs very well forn2¹⁶, the range of the experiments. It is conjectured that the average number of edges it creates—a good measure of its efficiency—is no more than twice optimal forn less than seven trillion. The improvement is shown to extend to the computation of the Delaunay triangulation in theL _p metric for 1<p.This research was supported by National Science Foundation Grants DCR-8352081 and DCR-8416190.     

Simulation of polycrystalline aluminum tensile test with crystal plasticity finite element method

The crystal plasticity was implemented in the finite element method（FEM） software ABAQUS through the user subroutine UMAT. By means of discretizing the space at the grain level with the Voronoi diagram method, a polycrystal model was built and used in the FEM analysis. The initial orientation of each grain was generated based on the orientation distribution function（ODF）. The developed model was successfully applied in simulation of polycrystalline aluminium samples deformed by the tensile tests. The theoretical strain--stress relation was in good agreement with the experimental result. The simulation results show that the grain size has significant effect on the deformation behavior. The initial plastic deformation usually occurs at grain boundaries, and multiple slip often results in an enhanced local hardening at grain boundaries.