能量平衡法静电驱动柔性振膜微泵特性分析

从能量平衡的角度建立了静电驱动柔性振膜微泵的平衡方程,基于对压缩过程中振膜动能的考虑,改进了最小能量法压缩模型,结合均匀压力载荷下圆薄膜大挠度形变理论对静电驱动柔性振膜微泵进行理论分析.对振膜与腔体壁面贴合的压缩过程中各能量相互转化的关系进行分析,并与最小能量法模型进行了对比.结果表明,能量平衡法考虑了薄膜振动过程中的动能,故薄膜与腔体具有更大的贴合面积,且以薄膜与腔体完全贴合时作为零应力参考状态降低压缩过程中的薄膜形变势能,计算得到的静电微泵的压缩效率更高,在驱动电压为300 V时,改进的双腔模型中振膜贴合半径为4.06 mm,所得最大压升为87.08 kPa.基于改进的模型,对双腔微泵压升的影响因素进行讨论,发现降低柔性薄膜厚度会使输出压力有所上升,并且减小腔体表面介电层厚度、减小腔体深度与半径可以有助于提高微泵的压升.     

磁能驱动微型泵的性能实验研究

在电磁场驱动原理的基础上,设计并研制了一种磁能驱动的微型泵。微型泵包括进／出液管、扩散管／喷管、驱动薄膜、腔体、电磁线圈和永磁体。微型泵的整体尺寸约为Ф11mm×4mm,腔室半径为5mm,深2mm。利用正交实验方法,对微型泵的性能进行了测试。在电压为4V、驱动薄膜厚度为6μm、频率为5Hz方波脉冲的最佳实验条件下,微型泵的最大泵送流速约为0．21mL／min。     

磁能驱动微型泵的性能研究

在电磁驱动原理的基础上,设计并研制了一种磁能驱动的微型泵。微型泵的整体尺寸约为Φ11mm×4mm,腔室半径为5mm,深2mm。利用方差分析方法对实验数据进行了检验,验证了前期微型泵研究中获得的性能参数的正确性。为了进一步缩小微型泵体积、简化控制方式和外围电路,针对微型泵的能源部分,开展了单双电源的对比实验研究,并获得了较好的实验结果。     

Study of an innovative one-sided actuating piezoelectric valveless micropump with a secondary chamber

Previous studies have indicated that a one-sided actuating piezoelectric micropump (OAPMP) combined with two valves may enhance the liquid flow rate to 4.1 ml/s and make it possible to reach the maximum pump head of 9807 Pa in a limited space. In this study, an innovative one-sided actuating piezoelectric valveless micropump (OAPMP-valveless) has been developed to actuate fluid at a higher flow rate in one direction by adding a secondary chamber. The secondary chamber plays a key role in the application of the valveless micropump: the flow rate of the pump can reach 0.989 ml/s by adding a secondary chamber. The maximum pump head is 1522.5 Pa when using the 0.3 mm-thick secondary diaphragm and the 0.5 mm-thick primary diaphragm. In addition, if a nozzle/diffuser element is applied to the OAPMP-valveless with a secondary chamber, the flow rate can be further improved to 1.183 ml/s at a frequency of 150 Hz. A three-dimensional numerical model of the valveless micropump has been built to compare the measured results with the simulated results.     

一种新型无阀微泵的原理和模拟

提出了一种新型无阀微泵的设计概念及相应的模型 ,它利用合成喷流动的基本原理实现对流体流动方向的控制 ,结构简单 ,工作频率高。对这种泵的工作状况进行了数值模拟和整体分析 ,结果表明这种泵流量大 ,在驱动器工作频率为 1 0 0 0 Hz,喷口雷诺数为 2 5 0 0时泵送空气流量达 6L/min     

高功率射频微系统的微泵研究进展

随着射频电子装备不断向高集成度和大功率方向发展,传统开式循环冷却技术已不能满足系统微型化及高热流密度散热需求,急需发展闭式循环片上冷却技术.微泵是闭式冷却系统的核心部件,而目前微流控泵的性能与射频微系统大流量、高扬程的需求存在量级差异,因此亟待明确射频微系统微泵的发展方向,研制符合要求的高性能微泵,以解决射频微系统散热...     

Micromixers to produce cosmetic emulsions

In the cosmetics industry, emulsions play a key-role in active solubilization and texture/efficacy optimization. However, depending on their physico-chemical properties, the active ingredients are often more stable in a single phase: for example, Vitamin A is more stable in an oily phase than in a water phase. We have developed a special mixing device which produces an emulsion in the body of the pump, immediately before application on the skin. The mixing unit consists of two silicon chips. Each chip has several Y-shaped microchannels and intersections etched on its upper surface. When the two etched surfaces are bonded together, they produce series of interconnecting micromixing elements which permit the repeat mixing of the two phases, thus producing an extremely homogenous emulsion. These micromixers require carefully designed formulae in which the physico-chemical properties of each raw material are essential to obtain a spontaneous emulsion. This device has been incorporated into a spray pack and optimized to deliver the spontaneous emulsion when finger pressure is applied.     

压电双晶片驱动的压电微泵的研究

介绍了一种基于MEMS技术的压电微泵。该微泵利用聚二甲基硅氧烷(PDMS)作为泵膜,利用双面湿法腐蚀形成被动阀,并利用压电双晶片作为驱动部件。对压电双晶片的理论变形量和压电微泵的泵腔变化量、泵腔压缩比进行了理论分析,并对其输出流量进行了测试。在100 V、20 Hz的方波驱动下,该压电微泵的最大输出流量为317μL/min。结果显示该压电微泵的制作工艺简单,具有良好的流体驱动性能。     

基于磁流体的微泵的研究进展

首先介绍了基于磁流体微泵的工作原理,并且根据Navier-Stokes公式推导出了磁流体在梯度磁场中所产生的驱动力大小。然后,回顾了磁流体微泵的发展历程,对各阶段磁流体微泵的产生进行了研究,梳理出了各磁流体微泵的发展脉络,并且详细描述了各微泵的结构特点以及优缺点。最后,简单展望了磁流体微泵的发展趋势,指出磁流体微泵发展中存在的问题,例如磁流体的制备、磁流体微致动理论体系不完善和新型磁流体微泵的设计等,并针对这些问题提出了有效的解决方案。     

压电微泵性能的终端特性分析及其模拟研究

 根据压电微泵的结构及其功能可将其划分成6个功能块或子系统：压电片子系统、泵腔、入口阀子系统、出口阀子系统、入口通道子系统和出口通道子系统．对6个子系统建立终端特性模型，并进行有关终端特性分析．最后，将压电微泵子系统的终端特性模型进行了组合，得到整个系统的特性模型．对此进行分析，可以方便地获得压电微泵的性能特性．