Monitoring of CdTe atomic layer epitaxy using in-situ spectroscopic ellipsometry

Atomic layer epitaxy or ALE has proven to be useful for the growth of epitaxial layers of high uniformity, good quality, and well-controlled thickness. In this study, we have carried out in-situ monitoring during the atmospheric pressure ALE of CdTe on GaAs (100) substrates using spectroscopic ellipsometry (SE). The susceptor temperature, reactant partial pressures, as well as the flow and flush duration for each precursor are crucial process variables for ALE growth. Growth was carried out for 20–25 cycles under different sets of these process conditions during the experiment and in-situ SE was used to verify the presence of layer-by-layer growth, which enabled the quick determination of the process window. We observed ALE growth of CdTe at 300°C, supporting the explanation that the growth of CdTe occurs via a surface catalyzed decomposition of the Te precursor di-isopropyltelluride (DIPTe). Investigation of ALE mode growth behavior for different susceptor temperatures and DIPTe flush times indicated that the growth was limited by competition between desorption and reaction of the adsorbed DIPTe species on the Cd terminated surface.     

钼酸盐对碳钢缓蚀作用机理的椭圆法研究

用椭圆法通过测定表面膜层厚度,折射系数和表面复盖度研究了钼酸盐对碳钢在工业冷却水中的缓蚀作用。实验结果表明:形成具有良好保护性能的较完整致密的表面膜层的最佳钼酸盐浓度为200ppm。文中对缓蚀作用机理进行了讨论。     

X-ray photoelectron spectroscopy of Pd/γ-alumina and Pd foil after catalytic methane oxidation

Samples of palladium supported on-alumina and a palladium foil were used as catalysts for methane oxidation at 550° C. The samples were quenched quickly in the reaction chamber to room temperature in flowing Ar and then transferred in vacuo for XPS analysis. Structure sensitivity was manifest from an increase in PdO stability and a decrease in carbon deposition relative to Pd with increasing particle size. The results were compared with recent ellipsometric data.     

石英晶体最大双折射率色散特性的椭偏测量

为了测量石英晶体最大双折射率的色散特性,在椭偏光谱仪的水平透射测量模式下,通过对确定厚度的石英波片相位延迟量的精确测量,计算出了石英晶体的最大双折射率值,并进行了误差分析。结果表明:这种方法光路简单、操作方便,屏蔽了光源的不稳定性;双折射率测量精度达到了10-6,比连续偏光干涉法的测量精度提高了1个数量级;实现了对石英晶体的最大双折射率色散特性的连续光谱测量;此方法对其它双折射晶体材料的双折射率色散特性的研究也同样适用。     

Detection of low molecular weight toxins using an optical phase method of ellipsometry

The method of total internal reflection ellipsometry (TIRE), which records simultaneously two parameters Δ and Ψ related to the amplitudes and phases of p- and s-components of polarised light, respectively, was exploited here for detection of mycotoxins (T-2 and zearalenone). The above mycotoxins in sub-ppb concentrations were detected using TIRE in both direct and competitive immunoassay. The study of immune reaction kinetics allowed the evaluation of adsorption/desorption rates and the association constant for zearalenone. The investigation of grain products samples revealed the presence of high concentrations of T-2 (>600 ng/ml) in mould products.     

Reflection and Absorption Techniques for Optical Characterization of Chemically Assembled Nanomaterials

This review discusses recent developments in the areas of fabrication, certain types of optical characterization, and applications of a selected class of chemically assembled nanomaterials, namely i) gold and silver nanoparticles deposited onto optically transparent glass substrates; ii) thiol‐functionalized self‐assembled monolayers (SAMs); iii) chemically stabilized gold and silver nanoparticles (monolayer protected clusters, MPCs); and iv) MPCs linked to metallic substrates and adsorbates. Six linear optical techniques for the characterization of these materials are discussed: transmission localized surface plasmon resonance spectroscopy, T‐LSPR; propagating surface plasmon resonance spectroscopy, P‐SPR; polarization‐selective Fourier transform infrared reflection absorption spectroscopy, PS‐FTIRRAS; polarization‐modulation Fourier transform infrared reflection absorption spectroscopy, PM‐FTIRRAS; surface‐enhanced infrared reflection absorption spectroscopy, SEIRRAS; and infrared ellipsometry. The review focuses particularly on providing a unified treatment of these six optical techniques by using a relatively simple stratified multilayer model.     

Automated metrology system including VUV spectroscopic ellipsometry and X-ray reflectometry for 300 mm silicon microelectronics

Spectroscopic ellipsometry has long been recognized as the technique of choice to characterize thin films and multilayers. Instrumentation for the next generation of VUV lithography at 157 nm requires special optical setup since O₂ and H₂O are extremely absorbing below 190 nm. A new system has been developed which works into a purged glove box to reduce the oxygen and water contamination in the part per million range. Ellipsometric and photometric measurements vs. wavelength and angle of incidence can be performed. Grazing X-ray option has been added on the same instrument to provide a better picture of the analyzed samples. This paper presents in detail the new system with its two measurement methods, and includes experimental results gate dielectrics layers and high k dielectrics.     

基于粒子群算法的椭偏法测量数据反演

为解决椭偏法测量薄膜厚度和折射率实验数据处理较为复杂的问题,采用一种新的基于群体智能的优化算法—粒子群算法处理实验数据.以单层吸收薄膜的测量为例,利用该算法进行数据处理.实验结果表明,三个薄膜参数(折射率n,消光系数k和薄膜厚度d)可以同时获得,而且在未知参数确切范围情况下,大范围内进行搜索仍然能保证快速收敛到最优解.文中算法和遗传模拟退火算法以及利用椭偏仪数据处理软件得出的结果相比较,表明该算法计算精度高,收敛速度快.     

A new ellipsometric approach for determining dielectric function of graphene in the infrared spectral region

Simple ellipsometric method for determining dielectric constants of absorbing two-dimensional materials on dielectric substrates is developed. The method is based on the analytical formulas obtained in the framework of a long-wave limit. An important feature of this approach lies in the fact that for data handling the problematic numerical calculation methods are not in use. The inversion problem is resolved analytically. The developed method has no need for the initial guesses of the desired parameters that is very useful from the practical point of view, for example, in the light of in-line control.     

吐温20对锌电极性能影响的掠射椭偏法研究

利用掠射式椭圆偏振光谱法现场考察了添加吐温20前后碱性介质中锌电极析氢性能的变化及其对锌电极性能的影响.试验结果表明:吐温20作为电解液添加剂能够影响1mol/dm3KOH溶液中锌电极上的析氢过程,随着吐温20添加浓度的增加,对析氢的抑制作用增加.掠射椭圆偏振参量与电极电位关系进一步表明吐温20对锌电极析氢过程的抑制作用属于几何覆盖效应,同时也表明碱性电解液中添加适宜浓度的吐温20可以有效地抑制阴极过程中锌电极的析氢反应、枝晶形成与电极变形.