压电叠堆泵驱动的新型直线马达

提出一种利用压电叠堆泵驱动的新型直线马达(简称压电液压马达),介绍了其系统构成及工作原理,并进行了理论及试验研究.理论分析结果表明,压电液压马达的性能是由压电振子/泵腔/截止阀/液压缸的结构尺寸、负载及工作频率等多种要素共同决定的,只有当相关要素合理配置时才能实现压电液压马达的预期功能.在其他参数确定的情况下,当负载为其最大驱动力的二分之一时输出功率和能量最大.利用尺寸为4 mm×4 mm×80 mm的压电叠堆制作了腔体直径为30 mm的压电泵,并对其直接输送流体及驱动液压缸时的流量、压力及功率等性能进行了测试与对比分析.结果表明,采用直径为15 mm的液压缸时,压电液压马达的最大速度、推力及功率分别为12.5 mm/s、32 N和93 mW.     

腔高对压电液压驱动器性能的影响

为满足大行程、高输出力精密驱动及振动控制的需求,设计了压电叠堆隔膜泵驱动的压电液压驱动器并进行了试验.利用实际液体可压缩的特性,建立了压电液压驱动器理论分析模型,分析了液体体积模量以及压电泵腔高对其输出性能的影响规律.结果表明,其他结构参数确定时压电液压驱动器输出能力随液体体积模量的减小而降低,并存在最佳腔高使其输出能力最大.利用尺寸为4 mm×4 mm×80 mm的压电叠堆制作了泵腔直径30 mm、高度分别为0.3 mm、0.6 mm、0.8 mm、1.0 mm、1.3 mm的压电泵,用于驱动尺寸为20×100 mm3的液压缸.以水为工作介质,在电压150 V、频率60～400 Hz条件下测试了驱动器的输出速度及驱动力.工作频率为300 Hz时,腔高0.6 mm(最佳值)时的输出速度为13.2 mm/s,分别为腔高0.3 mm和1.3 mm时的1.1倍和2.28倍;工作频率为80Hz时,腔高0.3 mm(最小腔高)时的驱动力为105 N,是腔高1.3 mm时驱动力的2.3倍,说明选取合理的泵腔高度可有效提高驱动器的输出性能.     

Efficiency characteristics of piezostack pump for linear actuators

A piezostack pump for linear actuators is presented and studied in terms of mechanical energy efficiency (MEE), energy conversion efficiency (ECE) and design method. MEE is defined as the ratio of the output mechanical energy to that converted from input electrical energy, and ECE is the ratio of output mechanical energy to input electrical energy. The analysis results show that both MEE and ECE decrease with the increase of stiffness of the chamber diaphragm (k_s), which is a function of the radius ratio (rigid disk radius to chamber radius). There is respective optimal external load (F_c) for them to achieve peak value for a given piezostack with blocked force (F_b) and stiffness (k_a). The optimal force ratio (F_c/F_b) is a constant of 0.5 for maximum MEE, and between 0.57 and 0.5 for maximum ECE. Considering the deflection of the pump chamber and dynamic response of the piezostack, the stiffness ratio (k_s/k_a) should be limited between 0.3 and 1, and the relative radius ratio is between 0.7 and 0.8. With the increase of the radius ratio in the range, the maximal MEE decreases from 0.38 to 0.25, and the peak ECE decreases from 0.20 to 0.14.     

前馈控制算法校正相移微动台非线性运动

压电陶瓷具有推力大,响应速度快,分辨率高和能耗低等优点,但其形变量小,所以需要位移放大机构对其形变量进行放大,实现长行程高分辨率位移。针对压电陶瓷作为驱动器,柔性铰链位移放大装置作为导向机构的相移微动台运动存在非线性问题,采用多项式模型对其位移特性进行建模,通过求解逆多项式获得使其线性运动非线性电压,利用实验对非线性运动校正结果进行验证。实验结果表明,所采用前馈控制算法可以很好的校正相移微动台非线性运动,校正后相移台在x,y方向产生的最大相移误差为4°与3.2°,满足高精度相移干涉测量对相移台相移误差要求。     

Design and experiment of a needle-type piezostack-driven jetting dispenser based on lumped parameter method

Micro liquid dispensing technology is widely used in the field of electronic packaging. This study presents a lumped parameter model of a needle-type piezostack-driven jetting dispenser, which can produce small high viscosity adhesive droplets with a high driving frequency. After describing the structural components and operating principles of the dispenser, a lumped parameter model for the system is derived by integrating the sub-models of the structural and fluid parts. According to the lumped parameter method, the fluid channels of the dispenser have been divided into several lumps to obtain a more accurate performance. Based on the proposed model, the jetting dispenser is designed and manufactured, and its performance is then evaluated through both computer simulations and experiments. Further experimental studies about its working properties based on the proposed dispenser are carried out. The results are used to guide the design and control works about the proposed dispenser.     

压电驱动液压放大式喷射系统

为了实现高速度高精度的非接触喷射式点胶,设计了一种压电驱动液压放大式喷射系统。该系统采用压电叠堆作为驱动源,基于液压放大原理放大压电叠堆的输出位移来实现胶液的喷射。对液压放大单元进行了理论分析,并结合压电叠堆的输出位移对液压放大单元进行了参数化设计;然后,利用激光测微仪分别测量了撞针和压电叠堆的位移,得到了液压放大单元在不同电压下的输出位移。最后,搭建了喷射系统实验平台,选用黏度为1 000cps的环氧树脂进行点胶性能测试,得到了驱动电压和高低电平时间对胶点体积的影响规律。实验显示,该喷射系统可稳定地实现每秒喷射143个胶点,胶点的体积误差可控制在±3.11%以内,是适用于电子封装行业的高效、高精度点胶方法。