X射线光刻掩模背面刻蚀过程中的形变仿真

开发了理论模型以验证有限元方法用于X射线光刻掩模刻蚀过程数值仿真的正确性。利用相同的有限元技术，对X射线光刻掩模的背面开窗、Si片刻蚀过程进行数值仿真。结果表明，图形区域的最大平面内形变(IPD)出现在上、下边缘处，最大非平面形变(OPD)出现在左、右边缘处。此外对Si片单载荷步刻蚀和多载荷步刻蚀的仿真进行比较，结果表明图形区域最终的形变量与Si片刻蚀的过程无关。     

Bifurcation points and bifurcated branches by an asymptotic numerical method and Padé approximants

The aim of this work is to develop a reliable and fast algorithm to compute bifurcation points and bifurcated branches. It is based upon the asymptotic numerical method (ANM) and Padé approximants. The bifurcation point is detected by analysing the poles of Padé approximants or by evaluating, along the computed solution branch, a bifurcation indicator well adapted to ANM. Several examples are presented to assess the effectiveness of the proposed method, that emanate from buckling problems of thin elastic shells. Especially problems involving large rotations are discussed. Copyright © 2004 John Wiley & Sons, Ltd.     

A Mixed-Approach Analysis of Deformations in Pipe Bends. Part 3. Calculation of Bend Axis Displacements by the Method of Initial Parameters

A problem of deformation of a curved shell loaded by internal pressure, axial force, and temperature difference is discussed. Physical equations are derived whereby the displacements and angles of rotation of the line of centers of mass of cross sections of a shell are related to loading parameters. A general constitutive set of equations for a curved element during its deformation is given. Using a method of initial parameters, an analytical solution is obtained for the differential equations for displacements and angles of rotation of the center line allowing for the action of distributed forces and moments.     

文克尔地基上中面x方向受力的矩形薄板的振动

建立文克尔地基上x=0与x=a两对边受面内均布拉(压)力作用的矩形薄板自由振动和强迫振动的微分方程并求得其通解。给出振型函数的表达式，用广义函数的富里叶展开，讨论板在不同形式载荷作用下的强迫振动响应。文中导出的各种情况下的影响函数，亦可用于求解相应情况下矩形薄板的静力弯曲与稳定性问题。     

A note on stress-constrained truss topology optimization

The purpose of this brief note is to demonstrate that general-purpose optimization methods and codes should not be discarded when dealing with stress-constrained truss topology optimization. By using a disaggregated formulation of the considered problem, such methods may find also “singular optima”, without using perturbation techniques like the ε-relaxed approach. Received February 19, 2002     

非对称复合材料层板在面内载荷作用下的非线性横向变形或屈曲

本文利用广义富里叶级数法对非对称复合材料层板在面内载荷作用下的非线性横向变形或屈曲问题进行了分析。文中主要研究了四边简支边界条件下,非对称层板的铺层方式和面内载荷形式对横向变形的影响。通过求解非线性控制方程得到了层板的载荷—挠度曲线或特殊情况下的后屈曲平衡曲线。计算结果表明,对于大多数非对称复合材料层板在面内载荷作用下所产生的是横向变形问题,而不是分叉屈曲问题。     

Dynamic elastic-plastic buckling phenomena in a rod due to axial impact

Dynamic elastic-plastic buckling phenomena which might develop in a rod from an axial impact loading are studied in order to identify the conditions for quasi-static behaviour. A discrete model for dynamic elastic-plastic buckling, which retains the axial and the lateral inertia forces, is proposed, and the relationship between the model parameters and the characteristics of an actual structure is given. Examples of different external loadings and boundary conditions are considered in order to clarify the influence of elastic-plastic axial wave propagation on the buckling process. The critical time for the initiation of buckling is obtained and the post-buckling behaviour of the model is analysed. Particular attention is paid to the role of the striking mass on the characteristics of the buckling process and on the development of the buckling shape. The numerical study reveals that the inertia of the striking mass affects considerably the development of the buckling shape causing different patterns of axial strain distributions at the initiation of buckling. The comparisons which are made between the model predictions and some previously published experimental data show that the buckling process is governed by the impact velocity as well as by the external loading history provided by the experimental technique.     

不规则I型和L型横截面形状薄壁杆件的横向弯曲稳定分析

根据势能驻值原理,采用转换B3样条函数模拟杆件横截面的翘曲位移场,文[8]提出了用于分析在横向荷载作用下薄壁杆件稳定问题的样条有限杆元法。方法适用于任意横截面形状和任意边界条件的薄壁杆件,考虑了杆壁中面上剪切变形的影响,能很好地描述剪力滞后现象。本文讨论了不规则I型截面简支梁和L型截面简支梁的屈曲分析,数值算例的结果表明了方法的灵活性、精确性和有效性。     

正交异性矩形薄板的稳定性分析

本文求得了正交异性矩形薄板屈曲位移函数微分方程的一般解。可用以求解任意边界矩形板的稳定问题。以两邻边简支，另两边自由的正方形板为例进行了计算。     

Buckling analysis for delaminated composites using plate bending elements based on higher‐order zig‐zag theory

A finite element based on the efficient higher‐order zig‐zag theory with multiple delaminations is developed. The bending part of the formulation is constructed from the concept of DKQ element. Unlike conventional elements, a developed element has its reference in the bottom surface which simplifies zig‐zag terms on formulation. Exact patch solutions are developed on elements which have the bottom reference system. The present element passes proper bending patch tests in the arbitrary mesh configurations in isotropic materials. Zig‐zag formulation is adopted to model laminated plates with multiple delaminations. To assess the accuracy and efficiency of the present element based on higher‐order zig‐zag theory with multiple delaminations, the linear buckling problem of laminated plates with multiple delaminations has been analysed. The results have been compared with three‐dimensional elasticity solutions. The present element works as an efficient tool for analysing the behaviour of the laminated composites with multiple delaminations. Copyright © 2002 John Wiley & Sons, Ltd.