Combustion Synthesis of SiO2 on the Aluminum Plate

IntnductionThere are a number of teChniques Presently available for the synthesis of nanopwhcles of oxides and nonokides, includingDndcrowave plasma synthesis['1, plasmaarc synthesisly, and pyrolysis and condensation ofchemical Precursors in the flame at ambient pressureal].The aPProach of uhlizing combushon synthesis toproduce oalde POwders, such as SiO2, A12O3 and TiO2, isalso a quite modem technology['"]. The synthesizedpndcles can be edictly deposited to form a thin film onthe surfac…     

Combustion synthesis of SiO2 on the aluminum plate

The approach of utilizing combustion synthesis to make fine particles of SiO₂, Al₂O₃ and TiO₂ is a quite modern technology. Through the chemical reaction in post-flame region, fine SiO₂ particles can be formed with high purity on plate surface. Therefore, the combustion synthesis of SiO₂ powders is an important area for further research and development, especially for the application of SiO₂ in the semiconductor industry. This investigation proposes an experimental approach (i.e., a gas-phase combustion synthesis) using two different kinds of organic compounds, Hexamethyldisilazane (HMDSA) and Hexamethyldisioxane (HMDSO), as the silicon precursors. A premixed gas burner is chosen with C₃H₈ as fuel, air as oxidant and part of the air was used as the carrying gas to entrain HMDSA/HMDSO vapor into the combustible mixture. Observations show that the C₃H₈/air flame changed color from a pale-blue flame to light yellow and then orange when different amounts of precursors were introduced. Through the chemical reaction in the post-flame region, fine SiO₂ particles were formed in the gas phase and then quenched and collected on an aluminum flat plate. The objective of this paper is to study the effects of HMDSO and HMDSA concentrations and flame temperatures on the synthesis of SiO₂ particles.