UV-LIGA深度光刻机平滑衍射技术研究

UV-LIGA深度光刻技术是加工微型机电系统的一项重要的微细加工技术。介绍了一种平滑衍射效应的位错强度叠加原理，它采用了蝇眼积分透镜去平滑衍射，并模拟数值计算了硅片表面的光强分布，最后给出了光刻结果。     

Yield response of lentil to directly applied and residual phosphorus in a Mediterranean environment

The response of lentil grown under rainfed conditions to directly applied and residual phosphorus (P) was described by a modified Mitscherlich equation, accounting for the effects of rainfall on (1) potential yield, and (2) the availability of soil-P to the crop. The response of lentil yield to directly applied and residual P was studied in two-course cereal–lentil rotational trials under rainfed conditions in a Mediterranean-type environment. Cereal crops were grown at different P application rates during 4 growing seasons at 3 sites, representing different rainfall zones in northwest Syria. Lentil (Lens culinaris Med.) was grown during 4 seasons at the same sites, each lentil crop following a cereal crop. In 3 out of 4 lentil-growing seasons, additional P was applied to lentil in subplots to compare the residual and direct effects of P application. The initial contents of extractable soil-P (P-Olsen) were low at all sites, in the range of 2–5 ppm P. Under the conditions of the experiments, lentil appeared to benefit slightly more from P applied to the preceding wheat crop (residual P) than from directly applied P. It is shown that the modified Mitscherlich equation could be used as a basis for P fertilizer recommendations for rainfed farming. As for lentil, it was concluded that a single application of P to the wheat crop in a wheat/lentil rotation could reduce the cost of lentil production, without reducing lentil yield.     

Towards high accuracy calibration of electron backscatter diffraction systems

For precise orientation and strain measurements, advanced Electron Backscatter Diffraction (EBSD) techniques require both accurate calibration and reproducible measurement of the system geometry. In many cases the pattern centre (PC) needs to be determined to sub-pixel accuracy. The mechanical insertion/retraction, through the Scanning Electron Microscope (SEM) chamber wall, of the electron sensitive part of modern EBSD detectors also causes alignment and positioning problems and requires frequent monitoring of the PC. Optical alignment and lens distortion issues within the scintillator, lens and charge-coupled device (CCD) camera combination of an EBSD detector need accurate measurement for each individual EBSD system.This paper highlights and quantifies these issues and demonstrates the determination of the pattern centre using a novel shadow-casting technique with a precision of ∼10 μm or ∼1/3 CCD pixel.     

Robust metric calibration of non-linear camera lens distortion

Camera lens distortion is crucial to obtain the best performance cameral model. Up to now, different techniques exist, which try to minimize the calibration error using different lens distortion models or computing them in different ways. Some compute lens distortion camera parameters in the camera calibration process together with the intrinsic and extrinsic ones. Others isolate the lens distortion calibration without using any template and basing the calibration on the deformation in the image of some features of the objects in the scene, like straight lines or circles. These lens distortion techniques which do not use any calibration template can be unstable if a complete camera lens distortion model is computed. They are named non-metric calibration or self-calibration methods.Traditionally a camera has been always best calibrated if metric calibration is done instead of self-calibration. This paper proposes a metric calibration technique which computes the camera lens distortion isolated from the camera calibration process under stable conditions, independently of the computed lens distortion model or the number of parameters. To make it easier to resolve, this metric technique uses the same calibration template that will be used afterwards for the calibration process. Therefore, the best performance of the camera lens distortion calibration process is achieved, which is transferred directly to the camera calibration process.     

Optimization of optical lens-controlled scanning electron microscopic resolution using generalized regression neural network and genetic algorithm

A scanning electron microscope (SEM) is a sophisticated equipment employed for fine imaging of a variety of surfaces. In this study, prediction models of SEM were constructed by using a generalized regression neural network (GRNN) and genetic algorithm (GA). The SEM components examined include condenser lens 1 and 2 and objective lens (coarse and fine) referred to as CL1, CL2, OL-Coarse, and OL-Fine. For a systematic modeling of SEM resolution (R), a face-centered Box–Wilson experiment was conducted. Two sets of data were collected with or without the adjustment of magnification. Root-mean-squared prediction error of optimized GRNN models are GA 0.481 and 1.96×10^-12 for non-adjusted and adjusted data, respectively. The optimized models demonstrated a much improved prediction over statistical regression models. The optimized models were used to optimize parameters particularly under best tuned SEM environment. For the variations in CL2 and OL-Coarse, the highest R could be achieved at all conditions except a larger CL2 either at smaller or larger OL-Coarse. For the variations in CL1 and CL2, the highest R was obtained at all conditions but larger CL2 and smaller CL1.     

超精密非球面镜面计算机辅助设计与应用

非球面镜面加工技术的研究已经成为先进制造技术的核心问题之一,相关的超精密装备制造关键技术除了机床本体,最重要的是系统控制软件及应用软件的开发,这是制约自主产权的超精密加工装备技术发展的瓶颈问题之一。结合作者在日本从事NEDO项目合作的实际经验,深入细致地阐述了超精密非球面镜面计算机辅助设计(CAD)系统的算法原理、系统结构及系统实现,并通过实际的光学镜面设计实例,介绍SGT-CAM软件系统具体开发及应用,为超精密非球面镜面的计算机辅助加工打下了基础。该系统已经成功地应用于自行开发的小型超精密镜面加工机SGT100上,形状误差小于100纳米,表面粗糙度小于5纳米,得到有关专家的充分肯定。     

多视角裸眼3D电视的技术实现

研究超高清多视角裸眼3D电视的实现技术,从方案成本、设计简易度、工艺实现、系统架构、产品性能等方面分别对采用光栅式裸眼3D技术和透镜式裸眼3D技术进行探讨,接着再从视觉表现和技术实现上分析了双视角裸眼3D技术和多视角裸眼3D技术的优缺点,认为超高清屏幕将有效解决多视角裸眼3D技术带来的3D画面分辨率降低问题,因此超高清多视角裸眼3D电视将是未来3D电视的发展主流。     

高精度立体视觉测量中一种通用的摄像机标定技术

实现了一种用于高精度立体视觉测量中摄像机标定的新技术。这种“两步法”技术能够标定摄像机的外部参数以及有效焦距、径向透镜畸变系数和图像尺度因子。它利用合理组织的求解次序使得每一步参数的求解都只须求解线性方程组,从而彻底改变了以往摄像机标定依赖于非线性优化方法。本文的理论和实验证明,这种新技术较以往算法更为快速、简便、精确。     

Zoom闪光灯变焦透镜设计

通过对Zoom闪光灯光学系统的分析，建立了光学系统的数学模型，导出有关公式，并通过编制程序，经计算机计算，得出了闪光灯中的变焦菲涅尔透镜参数及其所处的位置与闪光灯有效照射角的关系。最后得到一组理想的实用数据。     

航空摄影测量数码相机检校场的建立

介绍了航空摄影测量数码相机室外检校场的建立方法和工作流程,并提出了检校场建立的新思路．通过实验验证了由此建立的室外相机检校场,能够满足多种航空摄影测量数码相机的检校,精确测定非量测数码相机的内方位元素和光学畸变参数．对非量测数码相机在摄影测量中的应用具有重大的推动作用．