热丝辅助ECR CVD制备cBN薄膜

立方氮化硼(cBN)是一种具有广泛应用价值的Ⅲ-Ⅴ族二元化合物，其优异性质可与金刚石相比拟或胜之．立方氮化硼的制备与性能研究是近二十年来材料领域关注的焦点之一．我们用热丝辅助ECR CVD方法制备了cBN薄膜，并初步探讨了热丝对cBN形成的作用．偏压并不是cBN形成的唯一主要条件，活性粒子也有非常关键的作用．     

Wear mechanisms of PcBN tools when machining AISI 316L

This paper investigates the machinability of AISI 316L stainless steel without and with NMI treatment, when machined with three different PcBN tool grades: low cBN content (50% vol.), medium (65% vol.) and high (90% vol.). The NMI treatment consisted of resulfurized and Ca-treated steels with two different Si/Al ratio. The tool materials were evaluated in terms of tool life, showing the best performance for the medium cBN content grade. Results showed that the crater wear has a more significant effect on the tool performance than the standard wear criteria of maximum flank wear. The worn tools were examined using scanning electron microscopy (SEM), focused ion beam (FIB) and transmission electron microscopy (TEM). In most cases, the crater exhibited three distinct regions from the edge to the end of the contact zone: the plateau, middle crater, and the upper region. Plateau and crater region displayed tool protective layer (TPL), consisting mostly of Al, Si, Mg and Ca-oxides; and some dimples in the tool from preferential wear of cBN grains. In the upper region of the best performing material, a ~1.5 μm thick TPL of mostly MnCr₂O₄ spinel was found, a result of the transfer of Mn- and Cr-rich oxide NMIs found in this material or oxidation of workpiece material, during the machining process.     

Nitridation Kinetics of Silicon Monocrystal and Morphology of Nitride Film

Basing on TGA (thermal gravimetric analysis) of thermal nitridation at l200, l250, l300℃, respectively,analysis of high temperature kinetics for nitridation of silicon monocrystal has been carried out. According tothe theory for kinetics of reaction of vapour with solid phase a nitridation kinetic model, from which it can beshown thal the rate of nitridation reaction of silicon crystal should be controlled by three stage limiting factors,was proposed. These limiting factors are chemical reaction, chemical reaction mixed with diffusion and diffu-sion. Using this model to treat our experimental data, satisfactory correlation coefficient and apparentactivation energy of nitridation of p-type (lll) silicon crystal have been obtained. The nitride film was identi'fied to be a-Si_3N_4 (Hexagonal, a=0.7758nm,c_o=0.5623nm) by X-ray diffraction analysis. Morphology ofthe nitride films formed in different nitridation duration was observed in both planar andcross-sectional viewsby SEM (scanning electron microscope).     

n型单晶硅片的电阻率和扩散方阻对IBC太阳电池电性能的影响

叉指背接触式(IBC)太阳电池因正面没有金属栅线遮挡,具有较高的短路电流,且组件外观更加美观。但由于IBC太阳电池正负电极在背面交叉式分布,在制备过程中需要采用光刻掩模技术进行隔离,难以实现大规模生产。采用Quokka软件仿真模拟了电阻率和扩散方阻对n型IBC太阳电池效率的影响,并对不同电阻率和扩散方阻的电池片进行了实验验证,从n型单晶硅片电阻率的选择和扩散工艺优化方面为IBC太阳电池的规模化生产提供了理论基础。实验结果表明,电阻率为3~5Ω·cm、扩散方阻为70Ω/时,小批量生产的IBC太阳电池平均光电转换效率可达23.73%,开路电压为693 mV,短路电流密度为42.44 mA/cm²,填充因子为80.69%。     

Interface evolution in the platelet-like SiC@C and SiC@SiO<Subscript>2</Subscript> monocrystal nanocapsules

Carbon-coated SiC@C nanocapsules (NCs) with a hexagonal platelet-like morphology were fabricated by a simple direct current (DC) arc-discharge plasma method.The SiC@C NCs were monocrystalline,120-150 nm in size,and approximately 50 nm thick.The formation of the as-prepared SiC@C NCs included nucleation of truncated octahedral SiC seeds and subsequent anisotropic growth of the seeds into hexagonal nanoplatelets in a carbon-rich atmosphere.The disordered carbon layers on the SiC@C NCs were converted into SiO2 shells of SiC@SiO2 NCs by heat treatment at 650 ℃ in air,during which the shape and inherent characteristics of the crystalline SiC core were obtained.The interface evolution from carbon to SiO2 shells endowed the SiC@SiO2 NCs with enhanced photocatalytic activity due to the hydrophilic and transparent nature of the SiO2 shell,as well as to the photosensitive SiC nanocrystals.The band gap of the nanostructured SiC core was determined to be 2.70 eV.The SiC@SiO2 NCs degraded approximately 95％ of methylene blue in 160 min under visible light irradiation.     

SiC单晶片切割力建模与自适应控制

Si C单晶因优良的物理和机械性能而大量用于大功率器件和IC行业。但由于材料的高硬度和高脆性,使其加工过程变得很困难。为此,分析了Si C单晶片切割过程,建立切割过程模型,通过F检验法进行系统阶次辨识,采用遗忘因子递推最小二乘算法在线估计模型参数,建立进给量与切割力的差分方程,设计基于最小方差自校正的切割力控制器,并进行实验验证。结果表明:控制器能够很好的跟踪不同信号,具有良好的鲁棒性,提高了Si C单晶片的加工效率和表面质量。     

Large sized cubic BN reinforced nanocomposite with improved abrasive wear resistance deposited by cold spray

In this work, large sized cubic BN (cBN) reinforced nanocomposites are prepared by cold spray deposition of blended powder mixtures of mechanically alloyed 40 vol.% cBN–NiCrAl nanocomposite particles and large sized cBN particles. Deposition behavior of the blended powders, microstructure and mechanical properties including hardness, fracture toughness and two-body dry abrasive wear behavior of the sprayed composites, are investigated. Results show that dense composites with large cBN particle content of 13–20 vol.%, depending on composition of the spray powders, can be obtained. Declining deposition efficiency is detected as increasing large cBN content due to the gradually enhanced sand blasting effect. Increasing content of large cBN in spray powder results in an increment in hardness and a decrement in fracture toughness. Abrasive wear resistance of the 40 vol.% cBN–NiCrAl nanocomposite is doubled by incorporating 20 vol.% of the large cBN particles. Worn surface morphology observation indicates that the improvement is due to the shielding effect of the large protruding cBN particles against SiC abrasive. Material removal mechanism of the sprayed composites during abrasive wear test is also studied.     

Influence of cBN content,Al2O3 and Si3N4 additives and their morphology on microstructure,properties, and wear of PCBN with NbN binder

Polycrystalline cubic boron nitride (PCBN) tool materials with NbN binder without additives and PCBN with Al₂O₃ or Si₃N₄ micropowder and whisker additives were manufactured and compared. PCBN materials with Si₃N₄ whisker reinforcement have the best mechanical properties of all the evaluated materials. Composites reinforced with Al₂O₃ whiskers have the lowest fracture toughness. However, Al₂O₃ whisker-reinforced tools outperform both commercial and Si₃N₄ reinforced tools when machining hardened steel. Thus Al₂O₃ whisker-reinforced PCBN materials are promising for industrial applications, likely due to their higher resistance to oxidation and diffusional wear mechanisms during cutting operations.     

精密内圆磨床陶瓷cBN砂轮修整机理及工艺研究

本文针对精密内圆磨床的特点,采用金刚石滚轮对陶瓷cBN砂轮进行了修整工艺的实验研究。通过对修整后的砂轮形貌、磨削工件表面质量进行检测,研究了不同修整深度和轴向速度对修整质量的影响,并进一步分析了影响机理。结果表明:该修整方法修整精度好,修整效率高;当修整速比为0.8,修整进给深度为0.002～0.003mm,轴向速度为0.3m/min时能够较好的满足工件内圆精密磨削cBN砂轮的修整要求。     

Special features of brazing VZhM4 and VZhM5 single crystal alloys

The processes of recrystallization of single crystal nickel creep-resisting alloys in brazing were investigated. The methods of preventing recrystallization of the single crystal alloys are described. The microstructure of the brazed joints in the VZhM4 and VZhM5 alloys is investigated. The effect of heat treatment on the microstructure of the brazed joints in the VZhM4 and VZhM5 alloys is described and the strength of the brazed joints determined.