Laser scanning path generation considering photopolymer solidification in micro-stereolithography

It is essential to automate the scanning path generation process to effectively implement the micro-stereolithography. However, a scanning path that is generated based only on a 3D CAD model introduces dimensional inaccuracies. In micro-stereolithography, the photopolymer solidification is affected by fabrication conditions, such as the optical properties (laser power, laser scanning speed, laser scanning pitch focusing condition, etc.) and material properties of the photopolymer. Thus, the photopolymer solidification phenomena must be considered when generating a laser scanning path. In this paper, a scanning path generation algorithm that uses 3D CAD data and considers the photopolymer solidification phenomena is proposed to improve the dimensional accuracy in micro-stereolithography. Multi-line photopolymer solidification experiments were performed for various laser scanning conditions to examine the photopolymer solidification phenomena. From these experiments, linear relations between the solidification length (width) and scanning length (width) were acquired and stored in a database. Subsequently, these data were utilized to compensate the scanning path of the laser beam. In addition, experiments for determining the layer thickness in the z-direction were performed and these results were also used in the scanning path generation algorithm.This research was supported by the Highly Advanced National Project (http://www.most.go.kr), which performs some of the National R&D Program, and sponsored by the Korean Ministry of Science and Technology under the contract project code M10214000116-02B1500-02010.     

激光法合成SiC超细粉末物理化学过程的研究——Ⅰ.实验规律及粉末特性

用50W连续波CO_2激光器为热源,诱发SiH_4和C_2H_4反应,合成SiC超细粉末。实验确定了反应腔体内压力p、气源中的C/Si原子比、喷嘴内径2r以及激光功率密度与粉末特性之间的关系,并对合成的产物进行物理、化学表征。     

高质量的一级光栅1．55μmDFB激光器

本文详细叙述了ＤＦＢ激光器的设计要点和新的工艺。采用一级全息光栅和二步液相外延法批量研制出高稳定单纵模工作的１．５５μｍ分布反馈激光器（ＤＦＢ—ＬＤ）。外延片成品率＞４０％。器件特性：２５℃时阈值电流２０ｍＡ，单面光功率＞１０ｍｗ，主边模抑制比ＳＭＳＲ达４３ｄＢ（λ／４相移光栅），谱线宽度△ν－２０ｄＢ＝０．３ｎｍ，调制速率＞１．８ＧＨｚ。可靠性测试显示：高温监测光谱稳定，２５°Ｃ时阈值退化率△Ｉｔｈ／ｔ＜０．３ｍＡ／ｋｈ，对应器件预估寿命将超过１０万ｈ。     

Influence of the deposition atmosphere on the characteristics of Pd–Mg thin films prepared by pulsed laser deposition

Bilayered palladium (30 nm thick)–magnesium (350 nm thick) thin films were prepared using the pulsed laser deposition technique in the presence of various background gases (Ar, He and a mixture He + H₂) under different partial pressures (47 and 27 Pa). According to the deposition atmosphere, the Pd/Mg interface shows either a sharp or an extended transition. The electrochemical hydriding properties and the mechanical stability upon cycling of the Pd/Mg film are greatly improved when an extended «intermixing» zone between the Pd and Mg layers is present. The Pd–Mg films prepared under pure helium fulfill these conditions.     

Laser irradiation of oligosiloxane copolymer thin films functionalized with side chain bulky carbosilane moieties

Linear oligosiloxanes functionalized with bulky side chain tris(trimethylsilyl)hexyl (TTSH) substituents were transformed into cross-linked materials by UV 193 nm excimer pulsed laser ablation. The process occurred without any catalyst, by reactions of radicals formed in UV laser induced photolysis of side tris(trimethylsilyl)hexyl groups. Chemical changes were monitored by FTIR, LC/UV, GC/MS and solubility tests.     

LASER CLADDED TiCN COATINGS ON THE SURFACE OF TTTANIUM

Laser cladded coatings of TiCN were produced on the surface of titanium. To obtain the optimal techniques, several conditions were tested by varying the laser scanning rate. The choice of shielding gas was also studied. The cladded coatings were then evaluated from the surface mechanics point of view based on their microhardness. The microstructure of some interesting samples was investigated by optical micrographs （OM）. The results showed that under the condition of fixed pulse frequency and pulse width, the laser scanning rate and the shielding gas are the main factors influencing the components of coatings. TiCN coatings were decompounded and oxidized during the cladding process in the condition of no shielding gas of N2. X-ray diffraction results indicated that the composite coatings composed of TiCN, TiC, Ti2N, and TiO2 were produced using appropriate techniques. The results indicated that the best condition in terms of the surface microhardness is obtained when the scanning rate is 1.5mm/s, the pulse frequency is 15Hz, the pulse width is 3.0ms, and N2 is chosen as the shielding gas. The microhardness of the composite coatings is about 1331kg · mm^-2, which is about 4 times that of the substrate. The optical micrographs indicated that the cladding zone is made up of TiCN, TiO2 and some interdendritic Ti, but the diffusion zone mainly consists of the dendrites phase, and the cladded depth is about 80μm, which is more than 2 times that of the laser nitrided sample. There were no microcracks or air bubbles in the cladded sample, which was cladded using the above optimal techniques.     

一种可用于可调谐环行Ti：Al_2O_3激光器的宽带单向器

本文介绍一种宽带单向器的原理及设计。选用ＴＧＧ作磁旋光介质，旋光石英晶片作补偿片，所设计的色散补偿型宽带单向器预计可在７００～１０００ｎｍ波长范围内实现环行激光腔中的单向行波运行；将其应用在可调谐环行Ｔｉ：Ａｌ２Ｏ３激光器中，获得了良好的实验结果。     

SiGe: An attractive material for post-CMOS processing of MEMS

This work gives an overview of the different developments for silicon germanium (Si_1−xGe_x) from a MEMS post-processing perspective. First, the maximum processing temperature that does not introduce any damage or degradation into the standard characteristics of the CMOS driving electronics is specified. Then, the optimal type of silicon and germanium gas sources and deposition technique that results in an economical process are identified. Next, the selection criteria for a low thermal budget doping method and doping species are discussed. Finally, the advantage and disadvantage for the different approaches implemented for enhancing the physical properties of poly Si_1−xGe_x at a CMOS backend compatible temperature are highlighted. It is shown that the optimal method depends on the application requirements and the CMOS technology used for realizing the driving electronics.     

锡膏激光扫描三维测量系统光强自适应调节技术

根据锡膏激光扫描三维测量系统在测量PCB电路板时底板和锡膏对激光光强的散射效果不同,设计并研制了一套光强自适应调节光源。该光源以程控电源为基础,分析光条中心提取效果与激光光强的关系,应用小波分解与频带能量比相结合的光强自适应调节算法实现测量系统光强自适应调节功能。进行了相关实验,实验结果表明该光源能够很好地实现锡膏激光扫描三维测量系统的激光光强自适应调节,并能选出最适合测量的激光光强,具有很好的适用性。     

激光测速仪在宽厚板轧机后测长的运用

随着国内厚板产量的增加,其市场竞争日趋激烈。为了更好的谋求发展,莱钢宽厚板厂在降低生产成本的同时,通过技术改造极大地提高产品的质量。因为板坯成材规格需要精确的长度数据,所以宽厚板板坯长度的精确测量就显得非常重要。本文主要介绍激光测速仪在轧机后测长系统中的应用。