UV-LIGA深度光刻机平滑衍射技术研究

UV-LIGA深度光刻技术是加工微型机电系统的一项重要的微细加工技术。介绍了一种平滑衍射效应的位错强度叠加原理，它采用了蝇眼积分透镜去平滑衍射，并模拟数值计算了硅片表面的光强分布，最后给出了光刻结果。     

折反光学系统最佳红外像面位置的研究

较深入地研究了折反光学系统的红外像面,为确定实际的红外像面提出了一个新方法—计算从可见光边缘无色的弥散圆到红外最佳像面的距离。实践证明,这是确定这类光学系统最佳像面的一个方便、可靠的方法。     

Yield response of lentil to directly applied and residual phosphorus in a Mediterranean environment

The response of lentil grown under rainfed conditions to directly applied and residual phosphorus (P) was described by a modified Mitscherlich equation, accounting for the effects of rainfall on (1) potential yield, and (2) the availability of soil-P to the crop. The response of lentil yield to directly applied and residual P was studied in two-course cereal–lentil rotational trials under rainfed conditions in a Mediterranean-type environment. Cereal crops were grown at different P application rates during 4 growing seasons at 3 sites, representing different rainfall zones in northwest Syria. Lentil (Lens culinaris Med.) was grown during 4 seasons at the same sites, each lentil crop following a cereal crop. In 3 out of 4 lentil-growing seasons, additional P was applied to lentil in subplots to compare the residual and direct effects of P application. The initial contents of extractable soil-P (P-Olsen) were low at all sites, in the range of 2–5 ppm P. Under the conditions of the experiments, lentil appeared to benefit slightly more from P applied to the preceding wheat crop (residual P) than from directly applied P. It is shown that the modified Mitscherlich equation could be used as a basis for P fertilizer recommendations for rainfed farming. As for lentil, it was concluded that a single application of P to the wheat crop in a wheat/lentil rotation could reduce the cost of lentil production, without reducing lentil yield.     

Towards high accuracy calibration of electron backscatter diffraction systems

For precise orientation and strain measurements, advanced Electron Backscatter Diffraction (EBSD) techniques require both accurate calibration and reproducible measurement of the system geometry. In many cases the pattern centre (PC) needs to be determined to sub-pixel accuracy. The mechanical insertion/retraction, through the Scanning Electron Microscope (SEM) chamber wall, of the electron sensitive part of modern EBSD detectors also causes alignment and positioning problems and requires frequent monitoring of the PC. Optical alignment and lens distortion issues within the scintillator, lens and charge-coupled device (CCD) camera combination of an EBSD detector need accurate measurement for each individual EBSD system.This paper highlights and quantifies these issues and demonstrates the determination of the pattern centre using a novel shadow-casting technique with a precision of ∼10 μm or ∼1/3 CCD pixel.     

Robust metric calibration of non-linear camera lens distortion

Camera lens distortion is crucial to obtain the best performance cameral model. Up to now, different techniques exist, which try to minimize the calibration error using different lens distortion models or computing them in different ways. Some compute lens distortion camera parameters in the camera calibration process together with the intrinsic and extrinsic ones. Others isolate the lens distortion calibration without using any template and basing the calibration on the deformation in the image of some features of the objects in the scene, like straight lines or circles. These lens distortion techniques which do not use any calibration template can be unstable if a complete camera lens distortion model is computed. They are named non-metric calibration or self-calibration methods.Traditionally a camera has been always best calibrated if metric calibration is done instead of self-calibration. This paper proposes a metric calibration technique which computes the camera lens distortion isolated from the camera calibration process under stable conditions, independently of the computed lens distortion model or the number of parameters. To make it easier to resolve, this metric technique uses the same calibration template that will be used afterwards for the calibration process. Therefore, the best performance of the camera lens distortion calibration process is achieved, which is transferred directly to the camera calibration process.     

Analysis and evaluation of a general camera model

A versatile General Camera Model, GCM, has been developed, and is described in detail. The model is general in the sense that it can capture both fisheye and conventional as well as catadioptric cameras in a unified framework. The camera model includes efficient handling of non-central cameras as well as compensations for decentring distortion. A novel way of analysing radial distortion functions of camera models leads to a straightforward improvement of conventional models with respect to generality, accuracy and simplicity. Different camera models are experimentally compared for two cameras with conventional and fisheye lenses, and the results show that the overall performance is favourable for the GCM.     

Optimization of optical lens-controlled scanning electron microscopic resolution using generalized regression neural network and genetic algorithm

A scanning electron microscope (SEM) is a sophisticated equipment employed for fine imaging of a variety of surfaces. In this study, prediction models of SEM were constructed by using a generalized regression neural network (GRNN) and genetic algorithm (GA). The SEM components examined include condenser lens 1 and 2 and objective lens (coarse and fine) referred to as CL1, CL2, OL-Coarse, and OL-Fine. For a systematic modeling of SEM resolution (R), a face-centered Box–Wilson experiment was conducted. Two sets of data were collected with or without the adjustment of magnification. Root-mean-squared prediction error of optimized GRNN models are GA 0.481 and 1.96×10^-12 for non-adjusted and adjusted data, respectively. The optimized models demonstrated a much improved prediction over statistical regression models. The optimized models were used to optimize parameters particularly under best tuned SEM environment. For the variations in CL2 and OL-Coarse, the highest R could be achieved at all conditions except a larger CL2 either at smaller or larger OL-Coarse. For the variations in CL1 and CL2, the highest R was obtained at all conditions but larger CL2 and smaller CL1.     

Central catadioptric image processing with geodesic metric

Because of the distortions produced by the insertion of a mirror, catadioptric images cannot be processed similarly to classical perspective images. Now, although the equivalence between such images and spherical images is well known, the use of spherical harmonic analysis often leads to image processing methods which are more difficult to implement. In this paper, we propose to define catadioptric image processing from the geodesic metric on the unitary sphere. We show that this definition allows to adapt very simply classical image processing methods. We focus more particularly on image gradient estimation, interest point detection, and matching. More generally, the proposed approach extends traditional image processing techniques based on Euclidean metric to central catadioptric images. We show in this paper the efficiency of the approach through different experimental results and quantitative evaluations.     

双目立体摄像机标定方法研究

本文在张正友平面模板两步法的基础上,提出了一种改进的双目立体摄像机标定方法。该方法在摄像机畸变模型中充分考虑了切向畸变的影响,使得应用范围更广。本文在标定中通过选取图像中心附近的点作为初始预测值,再进行非线性搜索来确定摄像机内外参数。实验证明,本文标定模板制作简单,标定过程快捷,且具有较高的精度,完全可以满足双目立体视觉应用的要求。     

全动型变焦距物镜光焦度分配及倍率选段的优化规范

本文在讨论了最速变焦路线和权重光焦度的基础上,提出了全动型变焦距物镜光焦度分配及倍率选段的优化规范,并在IBM-PC/XT微型机上编制了相应的优化程序,给出了数值实例。结果表明,该优化规范和程序是可行和有效的。