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LIU Shu-ping JIA Yue-hu 《半导体光子学与技术》2006,12(1):21-24
According to Maxwell's theory, the optical transmission characteristics in GeSi/Si superlattice nanocrystalline layer have been analyzed and calculated. The calculated result shows that when the total thickness L is 340 nm, the single mode lightwave can be transmitted only at periodic number M≥15.5. In addition, at the direction of transmission, when the transmission distance is larger than 500 μm, the lightwave intensity is decreased greatly. Based on the above parameters, the design and manufacture of GeSi/Si superlattice nanocrystalline photodetector are carried out. 相似文献
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D. Y. C. Lie A. Vantomme F. Eisen T. Vreeland M. -A. Nicolet T. K. Carns K. L. Wang B. Holländer 《Journal of Electronic Materials》1994,23(4):369-373
We compare both the strain and damage that 100 keV Si irradiation at room temperature introduces in pseudomorphic and relaxed
GexSi1−x films grown on Si(100) substrates. The ion range is such that the Si/GexSi1−x interface is not significantly damaged. The amount of damage produced in pseudomorphic and relaxed GexSi1−x layers of similar x for irradiation doses up to 2.5 × 1014 Si/cm2 is the same, which proves that a pre-existing uniform strain does not noticeably affect the irradiation-induced damage. However,
the irradiation-induced strain does depend on the pre-existing strain of the samples. Possible interpretations are discussed.
On leave from Inst. voor Kern en Stralingsfysika, Catholic University of Leuven, Belgium. 相似文献
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Papichaya Chaisakul Mohamed-Said Rouifed Jacopo Frigerio Daniel Chrastina Jean-René Coudevylle 《Science and Technology of Advanced Materials》2014,15(1)
Electro-absorption from GeSi heterostructures is receiving growing attention as a high performance optical modulator for short distance optical interconnects. Ge incorporation with Si allows strong modulation mechanism using the Franz–Keldysh effect and the quantum-confined Stark effect from bulk and quantum well structures at telecommunication wavelengths. In this review, we discuss the current state of knowledge and the on-going challenges concerning the development of high performance GeSi electro-absorption modulators. We also provide feasible future prospects concerning this research topic. 相似文献
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A.I. Nikiforov V.A. Cherepanov O.P. Pchelyakov A.V. Dvurechenskii A.I. Yakimov 《Thin solid films》2000,380(1-2):158-163
In situ registration of high-energy electron diffraction patterns was used for constructing the diagram of structural and morphological states of the Ge film on the Si(100) surface. The following regions identified in the diagram: two-dimensional (2D)-growth, ‘hut’- and ‘dome’-clusters, ‘dome’-clusters with misfit dislocations at the interface. Variations in the lattice constants of the Ge film during the MBE growth on the Si(100) surface were determined. An increase in the lattice constant at the (100) surface was attributed to the elastic deformation at the stage of 2D growth and formation of ‘hut’-clusters and to the plastic relaxation for the ‘dome’-clusters. As a result, epitaxial silicon structures with germanium quantum dots of 15 nm base size at the density of 3×1011 cm−2 were synthesized. The total electron structure of the hole spectrum of Ge quantum dots in Si was established. 相似文献
5.
在Ge_xSi_1-x电光调制器和探测器已经问世的基础上,提出了一种将它们集成起来的结构,通过原理和工艺技术的分析,认为这种光电集成是完全可以实现的。 相似文献
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LI Dai-zong YU Zhuo CHEN Bu-wen HUANG Chang-jun LEI Zhen-lin YU Jin-zhong WANG Qi-ming 《半导体光子学与技术》1999,5(3):134-138
Using double crystal X-rays diffraction (DCXRD) and atomic force microscopy (AFM), the results of Ge x Si 1- x grown by UHV/CVD from Si 2H 6 and SiH 4 are analyzed and compared. Adsorbates can migrate to the energy-favoring position due to the slow growth rate from SiH 4. In this case, a Si buffer that isolates the effect of substrate on epilayer could not be grown, which results in a pit penetrating into epilayer and buffer. The FWHM is 0.055° in DCXRD from SiH 4. The presence of diffraction fringes is an indication of an excellent crystalline quality. The roughness of the surface is improved if grown by Si 2H 6; however, the crystal quality of the Ge x Si 1- x material became worse than that from SiH 4 due to much larger growth rate from Si 2H 6. The content of Ge is obtained from DCXRD, which indicates the growth rate from Si 2H 6 is largest, then GeH 4, and that from SiH 4 is least. 相似文献
8.
具有高电流处理能力的多发射极条微波功率GeSi HBT 总被引:1,自引:0,他引:1
本文对多发射极条(指)微波功率GeSi HBT进行了设计、制造和测试,并就测试结果对电流处理能力进行了研究.实验结果表明,对20~80指的GeSi HBT,发射极单位长度的电流密度I0在1.67~1.06A/cm之间变化.随发射极条数的增加,I0逐渐减少,分析认为这是由发射极条之间的热耦合引起有源区的温度非均匀分布而导致的.并且通过测试所得到的I0值,证明多指GeSi HBT可通过选择合适的发射极条数、条长和发射区面积获得更高的电流处理能力. 相似文献
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在研制成功GeSi全内反射型电光开关的基础上,对这种电光开关与GeSi/Si SLS红外传感器的集成可行性进行了深入探索。 相似文献