离子注入浅结制备技术

根据近年来的文献资料总结报道几种离子注入浅结制备技术，即：大角度偏转注入、分子离子注入、双离子注入，通过介质掩膜注入，注入固体源驱入扩散再分布、等离子体浸没离子注入（ＰＩＩＩ）和反冲离子注入等。     

10W QCW operation of a proton implanted GaAlAs diode laser array

We report one thick layer of hard-baked photoresist mask.The laser array stripe pattern was defined by standard wet lithography.With this mask, a 10 W QCW(quasi-continuous wave) operation of a narrow proton implanted multiple stripe conventional single quantum well separate confinement heterostructure(SQW-SCH) GaAlAs diode laser array has been realized.These devices exhibit the lateral far-field radiation pattern of a phase-locked array of gain-guided semiconductor injection laser array. The twenty stripe laser array has a lateral far-field beam divergence full width at half maximum (FWHM) of less than 3°, and three twenty stripe laser array has a beam divergence in the plane of the junction of about 9°.     

等离子体湮没离子注入

本文扼要地介绍了等离子体湮没离子注入的基本原理，特点，应用效果及发展趋向。     

17-4PH沉淀硬化不锈钢氮离子注入及其复合改性的研究

采用N+注入，N-C-O共渗结合N+注入的表面复合改性方法，探索强化17－4PH钢表面的有效途径，该方法赋予基体表面一定深度的改性范围与低摩擦系数，因而强化效果达到最佳。同时还探索了不同时效温度下，基体心部硬度变化的规律。     

等离子体浸没离子注入改善45钢的摩擦学性能

采用灯丝放电和射频(RF)辉光放电等离子体浸没离子注入(PⅢ)工艺对45钢表面进行了氮离子注入强化处理。通过X射线光电子能谱(XPS)、扫描电子显微镜(SEM)、显微硬度、针-盘磨损和电化学腐蚀试验等测试手段，分析比较了经灯丝放电PⅢ和RF辉光放电PⅢ改性后试样表面元素的浓度分布、显微硬度、摩擦磨损性能和耐腐蚀性能。结果表明：不同条件下的氮离子注入均能提高45钢表面的显微硬度、耐磨性和抗腐蚀性能；且RF辉光放电PⅢ处理后试样的显微硬度提高了76．8％，摩擦系数下降到0．3，与灯丝放电PⅢ处理后的试样相比，其表面强化效果更加明显。     

Nitriding aluminum alloys by N-multicharged ions implantation: Correlation between surface strengthening and microstructure modifications

This paper deals with the surface strengthening of aluminum alloys by means of a new process allowing multi-charged nitrogen ion implantation. X-ray photoelectron spectroscopy, grazing-incidence X-ray diffraction and atomic force microscopy were used to study microstructural changes involved by implantation. This microstructural study revealed the formation of AlN and AlONγ due to the low nitrogen concentration gradient obtained with multi-charged implantation. Nanoindentation and wear tests were performed to evaluate the mechanical properties of implanted surfaces. A significant improvement of wear resistance was observed as a consequence of the nitride protective layer formation. The observed surface hardening is attributed to both AlONγ and AlN formations and to the precipitation-induced stress.     

Tribological Behavior of Aluminum Alloys Implanted with Nitrogen,Titanium Then Acetylene

The composition depth profiles, structure and ball-on-disk frictional characteristics of aluminum alloys 2024 plasma-based ion implanted with nitrogen, titanium and nitrogen then acetylene were investigated. The layers implanted with nitrogen then with nitrogen and titanium and finally with acetylene included three zones: a top DLC (diamond-like carbon) zone, a C, Ti and N coexisting intermediate zone which undergoes chemical changes forming TiC, Ti(C,N), TiN, (Ti, Al)N and AlN second phases, and the bottom zone of the substrate. The micro-hardness and nano-hardness of these layers are HK7.8 GPa and 22 GPa, respectively. The layers showed lower friction coefficient and higher wear resistance. The Raman spectra for worn tracks after sliding for different numbers of cycles showed that when the loading was 1 N after sliding 10,000 cycles, a slight graphitization phenomenon of the DLC film is found. If the loading was 20 N, the graphitization phenomenon of the DLC film is more obvious after sliding 2000 cycles. The SEM morphologies of the wear tracks showed that when the load was 1 N, after sliding 7200 cycles the wear is from rubbing and abrasive wear. When the load was 20 N, after sliding 2000 cycles, delamination wear is dominant.     

不同剂量BF^＋2注入多晶硅栅氟迁移特性的二次离子质谱分析

借助ＳＩＭＳ技术，系统地分析了８０ＫｅＶ，２．５×１０１４、５×１０１４、１×１０１５、２×１０１５和３×１０１５ｃｍ－２ＢＦ＋２注入多晶硅栅在９００℃、３０ｍｉｎ热退火条件下，氟在多晶硅栅中的分布剖面，并对氟在多晶硅和二氧化硅中的迁移特性进行了深入讨论。     

eXiTCDSS: A framework for a workflow-based CBR for interventional Clinical Decision Support Systems and its application to TAVI

Clinical Decision Support System (CDSSs) should form an important part of the field of clinical knowledge management technologies through their capacity to support the clinical process and use of knowledge, including knowledge maintenance and continuous learning, from diagnosis and investigation through surgery, treatment and long-term care. The work presented shows a workflow-based CDSS designed to give case-specific assessment to clinicians during complex surgery or Minimally Invasive Surgery (MISs). Following a perioperative workflow, the designed software will use a Case-Based Reasoning (CBR) methodology to retrieve similar past cases from a case base to provide support at any particular point of the process. The graphical user interface allows easy navigation through the whole support progress, from the initial configuration steps to the final results organized as sets of experiments easily visualized in a user-friendly way. The eXiTCDSS tool is presented giving support to a recent complex minimally invasive surgery which is receiving growing attention lately, the Transcatheter Aortic Valve Implantation (TAVI). The results obtained are presented on a basis of a real TAVI case base of 82 patients operated at Rennes University Hospital.     

Ion implantation of semi—insulating InP materials

The methods for protecting InP surface against degradation during annealing,including encapsulant and encpsulant-free techniques;rapid thermal an-nealing of InP implanted layers;implanted ion species and some profiles of typical dopants,etc.,they are all the key techniques concerning ion implantation into se-mi-insulating InP,and have been reviewed synthetically as well.