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针对RGTO SnO2薄膜颗粒粒径较大的问题,通过控制直流磁控溅射时的溅射气压,制备出了纳米粒径RGTO SnO2薄膜,用SEM表征了其形貌及粒径分布,研究了溅射气压对其形核及生长过程的影响,测试了薄膜对乙醇的气敏特性。研究结果表明,改变溅射气压能够有效控制RGTO SnO2薄膜的粒径,这种控制作用主要发生在形核阶段,是通过溅射气压对沉积速率的影响产生的;气敏测试结果证实了该纳米粒径敏感膜具有较高的灵敏度和较快的响应恢复特性。 相似文献
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In this paper experimental results of a comparative X-ray Diffraction (XRD), Scanning Electron Microscopy (SEM), Atomic Force Microscopy (AFM) and X-ray Photoelectron Spectroscopy (XPS) study of the crystalline structure, the local morphology, and the surface and in-depth chemistry of SnO2 thin films obtained by Rheotaxial Growth and Thermal Oxidation (RGTO) method are presented. XRD rules out even a minor presence of a coexisting SnO phase. AFM and SEM show a fractal like morphology of nanograins (20 nm typical size) agglomerated in clusters of crystallites with a bimodal size distribution. XPS shows that the surface of the SnO2 crystallites is slightly under-stoichiometric as expected from the oxygen deficient termination of their facets. Noteworthy, as evidenced by XPS depth profiles, there are no significant changes of the surface chemistry of the RGTO film with argon ion sputtering. 相似文献
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The measurements of the response—in terms of the conductance changes—to oxygen adsorption of tin dioxide (SnO2) thin-film-based gas sensors were performed. The sensing SnO2 layers were obtained by means of the rheotaxial growth and thermal oxidation (RGTO) method. The sensor responses were measured under a dry gas flow containing oxygen in nitrogen, within the range of temperature from 25 to 540 °C. For comparison, similar studies were performed for a commercial SnO2 thick-film (TGS 812) gas sensor.The in-depth profiles of the chemical composition of the RGTO SnO2 layers were determined from the scanning Auger microprobe experiment. The changes in concentration ratios [O]/[Sn] and [C]/[Sn] from the near-surface region towards the grain bulk were shown. 相似文献
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