Application of megasonic cleaner to sub-micron particles of SIL optical flying head

 As the demand for large capacity storage drives has increased, the flying height of near-field recording (NFR) sliders becomes as small as 100 nm for super high storage density. Accordingly contamination problems have been a concern of information storage industry because it may cause a serious damage to solid immersion lens (SIL) of optical flying head. Sub-micro contaminants in air bearing of the NFR slider may affect the flyability and stability of the optical slider. In addition, the cleaning of small particles becomes more difficult as the contaminant particle size decreases because the adhesion force increases very much as the particle size decreases. Recently developed high-frequency ultrasonic (megasonic) cleaning technique have made it possible to remove sub-micron particles less than 100 nm without surface erosion and many remarkable results have been reported. In this paper, the megasonic technique is applied and tested for the cleaning of the flying head of NFR drive. 1 MHz ultrasound with maximum 100 W was used to remove polystyrene latex (PSL) particles and alumina particles deposited on the surface of the slider. Effective cleaning performance was observed without any damages on the slider surface using optical microscope and AFM at different ultrasonic energy levels and cleaning times. Received: 20 June 2002 / Accepted: 9 September 2002     

The Columbia University sub-micron charged particle beam

A lens system consisting of two electrostatic quadrupole triplets has been designed and constructed at the Radiological Research Accelerator Facility (RARAF) of Columbia University. The lens system has been used to focus 6 MeV ⁴He ions to a beam spot in air with a diameter of 0.8 μm. The quadrupole electrodes can withstand voltages high enough to focus ⁴He ions up to 10 MeV and protons up to 5 MeV. The quadrupole triplet design is novel in that alignment is made through precise construction and the relative strengths of the quadrupoles are accomplished by the lengths of the elements, so that the magnitudes of the voltages required for focusing are nearly identical. The insulating sections between electrodes have had ion implantation to improve the voltage stability of the lens. The lens design employs Russian symmetry for the quadrupole elements.     

一种高效过滤亚微米级细颗粒的新液固过滤技术——表层过滤

论述一种新的可高效过滤液体中亚微米级细颗粒的表层过滤技术,分析了表层过滤技术的特点、过滤模式、表层过滤基本条件和设计计算中所必需的数学模型。介绍了表层过滤技术在我国工业生产上推广应用的概况。     

A theoretical study of the performance of sub-micron MOSFET devices in the presence of edge potential

In the present communication we have presented a detailed theoretical analysis of the performance of the sub-micron device in the presence of the discontinuity at the Si–SiO₂ interface. It is assumed that due to interface discontinuity a potential develops at the edges (Source/Drain) in addition to the built-in-potential. This potential, called Edge Potential, measures directly the extent of the interface roughness. The effect of this potential is more critical in the case of short channel device where drain and source are in close proximity. Our analysis shows that the discontinuity is dominant at the edges but not in the channel. Drive current as well as saturation transconductance decreases in the presence of edge potential. These results suggest that the performance of the device degrades due to the interface roughness. Effect of interface roughness near the edges can be reduced at high gate voltage but it will result more interface roughness scattering.     

Morphology and conductivity of polyaniline sub-micron fibers prepared by electrospinning

Sub-micron fibers of pure polyaniline (PANI) doped with sulfuric acid or hydrochloric acid were prepared by electrospinning PANI with suitable molecular weight dissolved in hot sulfuric acid. A modified electrospinning setup was employed with a coagulation bath as a collector, where dilute sulfuric acid was used as coagulation bath. The factors influencing the morphology and conductivity of the synthesized PANI fibers were investigated, including the concentration of dilute H₂SO₄ solution in the coagulation bath, the doped PANI concentration in H₂SO₄ solution, the type of doping acid and the voltage applied to the solution. The morphologies of doped PANI fibers were characterized by scanning electron microscope (SEM). The structure of the resulting fibers was analyzed by Fourier transform infrared spectroscopy and UV–vis spectrometer. The conductivity of PANI fibers were characterized by I–V characteristics. Homogeneous PANI fibers with a diameter of 370 nm and a high conductivity of 52.9 S/cm were prepared. The possible mechanisms of different morphology formation and conductivity of PANI fibers were also discussed.     

亚微米4A分子筛的合成与表征

以云南云天化国际股份有限公司的磷肥副产物硅胶湿样为基础原料,补加铝酸钙,水热法制备亚微米4A分子筛.采用XRD、SEM和FT-IR等分析手段对产品进行了表征.结果表明采用水热法制备的产品结晶度为95%,形状规则、大小均匀,分布范围较窄;粒度较小、粒度≤1μm的可达到100%;钙离子交换容量为336 mgCaCO3/g(干基)4A分子筛,白度为95%,完全满足洗涤助剂的要求.     

Deactivation of Pt/wire-mesh and vanadia/monolith catalysts applied in selective catalytic reduction of NO<Subscript><Emphasis Type="Italic">x</Emphasis></Subscript> in flue gas

In this study the deactivation of Pt/wire mesh and vanadia/monolith catalysts by aerosol particles of some inorganic salts (K₂SO₄, KCl and ZnCl₂) with high or low melting points has been investigated. The aerosol particles may either diffuse within the matrix of the catalysts and block the mezzo and micro pores, or deposit on the outer surface of the catalysts and form a porous layer causing a mass transfer resistance that ultimately deactivates the catalysts. It has been observed that in both Pt/wire mesh and vanadia/monolith catalysts the deactivation effect of ZnCl₂ was more pronouced compared to other salts. As an example, after 31 hours of exposure to ZnCl₂, 10% of the catalysts activities was lost. This may be related to the ZnCl₂ lower melting point in comparison with other poisons. These results are in agreement with the previous findings for deactivation of wire-mesh catalysts used for oxidation of volatile organic compounds (VOC) and CO by exposing the catalysts to the aerosols generated from inorganic salts.     

高速气流碰撞法制备超细TATB粒子的研究

采用高速气流碰撞法对TATB进行细化,借助SEM技术对超细TATB粒子形貌进行表征。实验得到了平均粒径0.35mm、计算比表面积21m2g-1以上的亚微米超细TATB粒子,粒子外形近球形。     

Advanced etching of silicon based on deep reactive ion etching for silicon high aspect ratio microstructures and three-dimensional micro- and nanostructures

Different processes involving an inductively coupled plasma reactor are presented either for deep reactive ion etching or for isotropic etching of silicon. On one hand, high aspect ratio microstructures with aspect ratio up to 107 were obtained on sub-micron trenches. Application to photonic MEMS is presented. Isotropic etching is also used either alone or in combination with anisotropic etching to realize various 3D shapes.