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源气体流量比对F-DLC薄膜结构的影响 总被引:3,自引:1,他引:2
以高纯石墨作靶,CHF3/Ar作源气体采用反应磁控溅射法制备出了氟化类金刚石(F-DLC)薄膜。拉曼光谱表明,CHF3相对流量的增加会引起薄膜的D峰与G峰强度之比I(D)/I(G)减小,晶粒增大,芳香环结构出例下降。红外吸收光谱分析证实了这些推论,指出这是由于薄膜中氟含量上升的结果。 相似文献
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磁控溅射WO3薄膜特性研究 总被引:4,自引:0,他引:4
用磁控溅射法制成WO3薄膜,通过改变成膜的溅射参数来改变WO3薄膜的性能.利用XRD分析了样品的粒径大小,研究了成膜工艺参数对气敏元件性能的影响.结果表明,薄膜中WO3晶粒的平均尺寸为17 nm,该传感器对NOx气体有非常好的灵敏度和选择性,对体积分数为1×10-5的NOx气体灵敏度高于50倍,而对其他干扰气体的灵敏度小于2倍. 相似文献
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热氧化磁控溅射金属锌膜合成一维ZnO纳米棒 总被引:6,自引:2,他引:4
利用退火热氧化射频磁控溅射金属锌膜的方法在Si(111)衬底上制备了一维Zn O纳米棒,同时用多种测试手段对样品的晶体结构、表面形貌和光学性能进行了研究.XRD,SEM和TEM的测试结果表明,Zn O纳米棒为单晶相六方纤锌矿结构,呈头簪状向外发散生长,直径在30~60 nm左右,其长度可达几μm.PL 谱测试结果表明:在波长为280 nm光的激发下,在372 nm处有强的近带边紫外光发射和516 nm处的较微弱深能级绿光发射.说明合成的一维Zn O纳米棒的结晶质量和光学性能优良 相似文献
6.
Manabu Ishitobi Takeshi Myoi Koji Soshin Eiji Hiraki Mutsuo Nakaoka 《Electrical Engineering in Japan》2005,153(3):79-87
This paper presents a single lossless inductive snubber‐assisted ZCS‐PFM series resonant DC‐DC power converter with a high‐frequency high‐voltage transformer link for industrial‐use high‐power magnetron drive. The current flowing through the active power switches rises gradually at a turned‐on transient state with the aid of a single lossless snubber inductor, and ZCS turn‐on commutation based on overlapping current can be achieved via the wide range pulse frequency modulation control scheme. The high‐frequency high‐voltage transformer primary side resonant current always becomes continuous operation mode, by electromagnetic loose coupling design of the high‐frequency high‐voltage transformer and the magnetizing inductance of the high‐frequency high‐voltage transformer. As a result, this high‐voltage power converter circuit for the magnetron can achieve a complete zero current soft switching under the condition of broad width gate voltage signals. Furthermore, this high‐voltage DC‐DC power converter circuit can regulate the output power from zero to full over audible frequency range via the two resonant frequency circuit design. Its operating performances are evaluated and discussed on the basis of the power loss analysis simulation and the experimental results from a practical point of view. © 2005 Wiley Periodicals, Inc. Electr Eng Jpn, 153(3): 79–87, 2005; Published online in Wiley InterScience ( www.interscience.wiley.com ). DOI 10.1002/eej.20126 相似文献
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WANG Zhongmin Chi Ying Vanessa Li ZHOU Huaiying Sammy Lap Ip Chan SHI Liu 《稀有金属(英文版)》2006,25(5):543-548
AB5-based hydrogen storage thin fdms (LaNi4.25Al0.75), deposited on Cu substrate by dc magnetron sputtering were investigated in this study. X-ray diffraction (XRD) revealed that the microstructure of the layer was in crystal form. SEM and AFM analyses proved that the film appeared to be rather rough with numerous randomly sized pores of approximately 15-40 in nm diameter. Structural stability of the film was examined by the combined analyses of DSC, XRD, and SEM, which indicated that this film maintained its structural stability below 500 K or so, and a network structure was observed on the film after being heated at 700 K for 30 min. Electrochemical hydrogen-storage properties of the films were investigated by simulated battery tests. It was found that single-layered LaNi4.25A10.75 film exhibited electrochemical hydrogen-storage properties similar to typical AB5 alloys in bulk, and the maximum discharge capacity of the film was about 220 mAh/g. After 20 charge/discharge cycles, small needle-shaped aluminium oxide was formed on some fractions of the film surface. 相似文献
9.
Role of deposition parameters on microstructure and mechanical properties of chromium oxide coatings
Chromium oxide coatings were deposited by reactive magnetron sputtering on high speed steel (HSS) substrate under various oxygen flow rates and radio frequency (RF) powers. The effect of deposition conditions on the microstructure, hardness and critical load of chromium oxide coating failure was studied. The results indicated that a crystalline chromium oxide coating formed at a high oxygen flow rate and a low RF power exhibited a higher hardness and a lower critical load as compared to a chromium oxide coating with an amorphous microstructure. 相似文献
10.
STUDY ON Ni-Cr SYSTEM SOLAR SELECTIVE THIN FILMS PREPARED BY MAGNETRON REACTIVE SPUTTERING PROCESS 总被引:1,自引:0,他引:1
B. W. Wang H. Shen Guangzhou Institute of Energy Conversion The Chinese Academy of Sciences Guangzhou China 《金属学报(英文版)》2002,15(2):203-206
1. IntroductionSolar selective thiIl solid fil1us are the key part for solar heat collect'ors. But ll1ostfactories still produced solar absorptive filn1s by traditional tecIl11ology sucl1 as pai1ltillga1ld electrocl1eluical process that nlust result in po… 相似文献