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排序方式: 共有258条查询结果,搜索用时 15 毫秒
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针对陶瓷基微热板MEMS器件难以微加工,器件表面加热Pt膜使用普通正性光刻胶难以实现光刻剥离的工艺难点问题,提出了激光微加工和柔性机械剥离相结合的微加工方法。以AlN陶瓷为衬底基片,采用激光微加工技术实现热隔离刻蚀体加工,刻蚀梁宽可达0.2 mm。采用柔性机械剥离工艺制备方法解决普通正性光刻胶形成倒梯形凹槽Pt膜难实现图形化问题,可在复杂表面特性的陶瓷基衬底上实现Pt膜剥离线宽10μm。同时利用有限元法进行传感器阵列设计和热结构仿真,验证设计工艺的可行性。 相似文献
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直角坐标激光直写的动态曝光模型 总被引:2,自引:0,他引:2
在兼顾胶层的光吸收特性、直写光束的高斯分布特征以及直写光束与胶层相对运动的情况下,建立了直角坐标激光直写的动态曝光模型以有效预测线条的线宽和侧壁角.仿真实验表明:以恒值高斯光强曝光时,该模型与等效仿真条件下的Dill曝光模型仿真结果完全一致.进一步证明了该模型的有效性和正确性,解决了目前在激光直写中存在的只能预测线宽或在忽略光刻胶吸收作用的情况下粗略估计直写线条轮廓的问题.同时,基于该模型分别分析了直写光功率和直写速度对线条轮廓的影响机理,为优化激光直写工艺的加工参量提供了一种有效的分析途径. 相似文献
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Abstract Among the parameters that affect photolithography, the most important are exposure and development time which affect the coating photoresist characteristics. This study further researches the relationship between the exposure and development time using a high speed image inspection system, and the relationship between the development time and photoresist depth using a Scanning Probe Microscope (SPM). A partial scan CCD camera and high speed frame capture card were used to obtain the photoresist development processing parameters. The experimental results verified that this imaging system provides an economical and effective method for producing a micro‐photo‐etched product. It is expected that these experiments can also offer some good references useful in the micro electro mechanical industrial field. 相似文献
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Nicholas J. Kybert Gang Hee Han Mitchell B. Lerner Eric N. Dattoli Ali Esfandiar A. T. Charlie Johnson 《Nano Research》2014,7(1):95-103
Arrays of chemical vapor sensors based on graphene field effect transistors functionalized with single-stranded DNA have been demonstrated. Standard photolithographic processing was adapted for use on large-area graphene by including a metal protection layer, which protected the graphene from contamination and enabled fabrication of high quality field-effect transistors (GFETs). Processed graphene devices had hole mobilities of 1,640 ± 250 cm2.V-1.s-1 and Dirac voltages of 15 ± 10 V under ambient conditions. Atomic force microscopy was used to verify that the graphene surface remained uncontaminated and therefore suitable for controlled chemical functionalization. Single-stranded DNA was chosen as the functionalization layer due to its affinity to a wide range of target molecules and π-π stacking interaction with graphene, which led to minimal degradation of device characteristics. The resulting sensor arrays showed analyte- and DNA sequence-dependent responses down to parts-per-billion concentrations. DNA/GFET sensors were able to differentiate among chemically similar analytes, including a series of carboxylic acids, and structural isomers of carboxylic acids and pinene. Evidence for the important role of electrostatic chemical gating was provided by the observation of understandable differences in the sensor response to two compounds that differed only by the replacement of a (deprotonating) hydroxyl group by a neutral methyl group. Finally, target analytes were detected without loss of sensitivity in a large background of a chemically similar, volatile compound. These results motivate further development of the DNA/graphene sensor family for use in an electronic olfaction system. 相似文献
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Yanmin Zhou Adam Robinson Ullrich Steiner Walter Federle 《Journal of the Royal Society Interface》2014,11(98)
Insect climbing footpads are able to adhere to rough surfaces, but the details of this capability are still unclear. To overcome experimental limitations of randomly rough, opaque surfaces, we fabricated transparent test substrates containing square arrays of 1.4 µm diameter pillars, with variable height (0.5 and 1.4 µm) and spacing (from 3 to 22 µm). Smooth pads of cockroaches (Nauphoeta cinerea) made partial contact (limited to the tops of the structures) for the two densest arrays of tall pillars, but full contact (touching the substrate in between pillars) for larger spacings. The transition from partial to full contact was accompanied by a sharp increase in shear forces. Tests on hairy pads of dock beetles (Gastrophysa viridula) showed that setae adhered between pillars for larger spacings, but pads were equally unable to make full contact on the densest arrays. The beetles'' shear forces similarly decreased for denser arrays, but also for short pillars and with a more gradual transition. These observations can be explained by simple contact models derived for soft uniform materials (smooth pads) or thin flat plates (hairy-pad spatulae). Our results show that microstructured substrates are powerful tools to reveal adaptations of natural adhesives for rough surfaces. 相似文献
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研究了一种基于介电泳机理的金纳米颗粒传感器装配方法。在分析介电泳工作原理的基础上,利用Comsol Multiphysics仿真软件,对平面微电极条件下所产生的空间电场进行了建模仿真,研究了金纳米粒子极化模型及相关介电泳频谱特性。设计加工了基于光刻标准工艺和引线键合技术的平面微电极阵列,构建了具有三维位移平台和视频监控装置的介电泳装配实验平台。以250nm金颗粒为实验对象,在理论分析基础上,完成了在微电极阵列上的介电泳组装实验研究,并通过电特性测量验证了组装结果。实验结果表明:金纳米颗粒的介电泳组装效果与介质溶液的电导率、电场频率和幅度、金纳米粒子浓度、电极间隙及作用时间有关,在适宜的条件下,采用介电泳技术可实现对金纳米颗粒的有效操控和纳米器件装配,该方法为纳米传感器的制造提供了一种有效途径。 相似文献