Silicon nitride layers of various n-content: Technology, properties and structure

Two series of amorphous silicon nitride layers (a-SiN_x:H) were formed with Radio Frequency Chemical Vapor Deposition method (13.56 MHz) from a NH₃/SiH₄ gas mixture: the first one on Si (001) and the second on glass. The deposition process was repeated at various [NH₃]/[SiH₄] ratios, while the other parameters (pressure, plasma generator power, substrate temperature, total gas flow, and time) were kept constant. It has been confirmed in optical measurements that the refractive indexes decrease for the layers obtained at increasing [NH₃]/[SiH₄] ratios. Simultaneously, the position of the band assigned to Si-H stretching vibrations (at about 2100 cm^− 1) shifts towards higher frequencies. The observed dependencies were applied in evaluation of nitrogen and hydrogen contents in the respective layers. It has been shown that when [NH₃]/[SiH₄] increases from 0 (no silane flow) to 0.2 then the a-SiN_x:H layers of x = [N]/[Si] increasing between 0 and nearly 1.4 may be obtained. The obtained layers have the refractive indexes higher than 2.1 and lower than 2.7 which make them good materials for antireflective coatings on crystalline and multicrystalline silicon solar cells.     

Microstructural and corrosion resistance characterisation of NiTi shape memory alloy modified at low-temperature plasma with carbon coatings produced via RFCVD and IBAD methods

ABSTRACT

NiTi shape memory alloy, both before and after low-temperature oxynitriding under glow discharge conditions combined with the production of a nano-sized outer carbon coating, was investigated. The study compares two types of carbon coatings: produced via the RFCVD (radio frequency chemical vapour deposition) and IBAD (ion beam-assisted deposition) methods. The latter was also enriched by randomly distributed silver nanoparticles. The study showed slight changes in roughness parameters and increased corrosion resistance after surface treatment processes. The largest impedance module and corrosion potential and the smallest density of corrosion current were achieved for samples with a carbon coating produced via the RFCVD process. The presented surface modifications using hybrid processes can extend the use of NiTi alloy in medicine due to the increased biocompatibility.     

采用End-Hall源沉积类金刚石膜

介绍了两种普遍采用的类金刚石(DLC)膜沉积方法。在此基础上叙述了采用End-H all源沉积DLC膜的方法,在简单说明其工作原理的同时给出了实验的各项技术参数;通过对实验结果和DLC膜样品的分析,可看出用End-H all源沉积方式能够消除RFCVD沉积方式所带来的边缘效应。