SiGe／Si多量子阱中垂直方向红外吸收及共振色散效应

用垂直入射的中红外光束调制非掺杂SiGe/Si量子阱中光致子带间吸收，氩离子激光器作为子带间跃迁的光泵浦源在阱中产生载流子，红外调制光谱用步进式傅立叶变换光谱仪记录，实验中观察到明显的层间干涉效应与子带间跃迁有关的色散效应，理论和实验分析认为样品折射率变化造成的位相调制可以补偿吸收所造成的幅度调制。     

SiGe:GaP合金的微观结构和温差电特性

经高温热处理后的 SiGe∶GaP 半导体温差电材料,其微观结构由具有富 Si 相特征变化成为具有富 Ge 相特征,温差电优值也得到了提高。实验还表明,材料晶格热导率的降低与富 Si 相的消失和富 Ge相的出现有关。然而,塞贝克系数和电导率的显著变化却与微观结构中富 Si 相和富 Ge 相的变化基本无关。通过对材料微观结构和温差电特性比较发现,具有富 Ge 相特征的微观结构对应于较大的温差电优值。     

CMOS兼容近红外Si0.7Ge0.3/Si p-i-n(SOI)光电探测器

报道了一种采用UHV/CVD锗硅工艺和CMOS工艺流程在SOI衬底上制作的横向叉指状Si0.7Ge0.3/Si p-i-n光电探测器.测试结果表明:其工作波长范围为0.7～1.1μm,在峰值响应波长为0.93μm,响应度为0.38A/W.在3.0V的偏压下,其暗电流小于1nA,寄生电容小于1.0pF,上升时间为2.5ns.其良好的光电特性以及与CMOS工艺的兼容性,为研制能有效工作于近红外光的高速、低工作电压硅基光电集成器件提供了一种新的尝试,在高速光信号探测等应用中有一定的价值.     

SiGe HBT基区结构的优化对欧拉电压的影响

欧拉电压是SiGe HBT一项重要的直流参数,受到基区结构(如Ge组分)的影响。研究发现,高温过程会导致硼的外扩散,从而影响异质结的位置,使欧拉电压受到影响。实验发现,通过优化基区结构,加厚CB结处i-SiGe厚度,可获得VA=520 V,βVA=164,320 V的SiGe HBT。     

1.55μm Si基光电探测器的研究进展

从材料的生长、器件结构的选择等方面对1．55μm锗光电探测器的研究进展进行了综述，对Ge量子点共振腔增强型光电探测器的应用前景进行了探讨与展望。     

Monolithic SiGe Up‐/Down‐Conversion Mixers with Active Baluns

The purpose of this paper is to describe the implementation of monolithically matching circuits, interface circuits, and RF core circuits to the same substrate. We designed and fabricated on‐chip 1 to 6 GHz up‐conversion and 1 to 8 GHz down‐conversion mixers using a 0.8 µm SiGe hetero‐junction bipolar transistor (HBT) process technology. To fabricate a SiGe HBT, we used a reduced pressure chemical vapor deposition (RPCVD) system to grow a base epitaxial layer, and we adopted local oxidation of silicon (LOCOS) isolation to separate the device terminals. An up‐conversion mixer was implemented on‐chip using an intermediate frequency (IF) matching circuit, local oscillator (LO)/radio frequency (RF) wideband matching circuits, LO/IF input balun circuits, and an RF output balun circuit. The measured results of the fabricated up‐conversion mixer show a positive power conversion gain from 1 to 6 GHz and a bandwidth of about 4.5 GHz. Also, the down‐conversion mixer was implemented on‐chip using LO/RF wideband matching circuits, LO/RF input balun circuits, and an IF output balun circuit. The measured results of the fabricated down‐conversion mixer show a positive power conversion gain from 1 to 8 GHz and a bandwidth of about 4.5 GHz.     

Germanium islands embedded in strained silicon quantum wells grown on patterned substrates

Germanium islands were embedded in strained silicon quantum wells in order to provide an improved electron confinement in vicinity of the islands. Growth was performed on relaxed SiGe layers. Patterned substrates were used, favouring lattice relaxation as well permitting the fabrication of small Ge islands at deposition temperatures above 500 °C. Photoluminescence analysis reveals a strongly reduced dislocation related signal. The low temperature spectra are dominated by intense signals from the germanium islands. The origin of these signals were investigated by removing the islands by etching, analysing reference samples without a silicon quantum well, varying the germanium deposition and the growth temperature.     

利用Volterra级数的低噪声放大器线性增强设计

针对单级宽带低噪声放大器（LNA）非线性难以定量分析以及难以将电路设计与线性指标联合设计的问题,提出利用Volterra级数和双极非线性模型相结合的方法优化电路线性度。该方法从SiGe双极管非线性模型出发,提取影响线性度的模型参数,并利用维塔里级数和双极管非线性模型导出器件非线性传输函数,推演出其与IIP3的相互关系,量化各个参数的非线性比重,提出优化线性度的电路设计方法。研究结果表明,在1.5-20GHz的宽频工作频带下,单级低噪声放大器的输入和输出均可实现良好的匹配（<-10dB）,达到16dB的增益,噪声系数在整个频带下小于3.6dB,IIP3可达-7.73dBm。     

Gas Source Molecular Beam Epitaxy Growth of Si_(1-x)Ge_x/Si Alloys

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基于紫外光刻的双轴张应变Ge/SiGe多量子阱电吸收调制器北大核心CSCD

采用紫外光刻工艺(ultraviolet lithography technique,UVL),在互补金属氧化物半导体(complementary metal oxide semiconductor,CMOS)兼容的硅基平台上制作了基于悬空微桥结构在Ge/SiGe多量子阱材料中引入双轴张应变的低偏振相关电吸收调制器。利用拉曼光谱测试了器件引入双轴张应变的大小,并对器件在横电(transverse electric,TE)偏振和横磁(transverse magnetic,TM)偏振下的光电流响应、调制消光比和高频响应等性能进行了测试。器件的低偏振相关消光比在0 V/4 V工作电压下可达5.8 dB,3 dB调制带宽在4 V反向偏置电压时为8.3 GHz。与电子束光刻工艺(electron beam lithography technique,EBL)相比,采用UVL制作的器件在调制消光比、高频响应带宽等性能上略差一点,但具有曝光时间短、成本低和可大批量生产等优势,应用前景广阔。