微桥法镍膜的弹性模量和残余应力测量

利用MEMS技术制作了不同尺寸的镍(Ni)膜微桥结构样品。采用纳米压痕仪XP系统测量了微桥载荷与位移的关系,并结合微桥力学理论模型得到了两种不同尺寸的Ni膜的弹性模量和残余应力。结果表明,两种不同尺寸的Ni膜的弹性模量结果一致,为190 GPa左右,但是残余应力变化较大。与采用纳米压痕仪直接测得的带有硅(Si)基底的Ni膜弹性模量186.8 7.5 GPa相比较,两者符合较好。     

测辐射热计的微桥研制和Vox膜成膜研究

介绍了测辐射热汁的工作原理、器件结构的几何形状和研制状况,叙述了测辐射热计材料的特性及制备技术.     

基于负温度系数的多晶硅电阻电热激励/压阻检测微桥谐振器的新型红外探测器

报道了一种基于负电阻温度系数的多晶硅电阻电热激励/压阻检测SiO 2/Si3N4/SixNy微桥谐振器的新型红外探测器.微桥谐振器吸收的红外辐射引起微桥温度升高,激励电阻和检测电桥的阻值减小,使得恒定激励电压作用下激励电阻的静态功率和惠斯登电桥的焦耳热增加,等效于增加了辐射在微桥谐振器上的红外辐射.初步的实验证实了该方案的可行性.     

Lithographic patterning of superconducting YBCO films

Microbridges of YBa₂Cu₃O₇ thin films have been fabricated by conventional photolithography and wet chemical etching using EDTA, and by the lift-off lithography technique. The variation of etch rate with etch time, etchant temperature, and post-deposition sintering temperature has been studied. It has been shown that both techniques are useful for film patterning. However, an additional sintering step is necessary for the chemically etched sample to regain the original film properties. An order of increase in critical current density is observed for the patterned film.     

MICROBRIDGE TESTING OF YOUNG''''S MODULUS AND RESIDUAL STRESS OF NICKEL FILM ELECTROPLATED ON SILICON WAFER

Microbridge testing is used to measure the Young's modulus and residual stresses ofmetallic films. Nickel film microbridges with widths of several hundred microns arefabricated by Microelectromechanical Systems. In order to measure the mechanicalproperties of nickel film microbridges, special shaft structure is designed to solve theproblem of getting the load--deflection curves of metal film microbridge by Nanoin--denter XP system with normal Berkovich probe. Theoretical analysis of the micro--bridge load--deflection curve is proposed to evaluate the Young's modulus and residualstress of the films simultaneously. The calculated results based on the experimentalmeasurements show that the average Young's modulus and residual stress are around190GPa and 175MPa respectively, while the Young's modulus measured by Nano-hardness method on nickel film with silicon substrate is 186.8±7.34GPa.     

悬桥式微流量传感器

本文报导了悬桥式微流量传感器的制作以及特性测试，这种传感器采用硅微机械加工技术在硅片上制作微悬桥，微悬桥由二氧化硅、ＬＰＣＶＤ多晶硅、ＬＰＣＶＤ氮化硅三明治结构材料组成。该传感器可测量０．０１～１００ＳＣＣＭ的气体流量，其响应时间小于１０ｍｓ，芯片尺寸为７×６ｍｍ２。     

热释电薄膜单片式UFPA器件微桥单元结构研究

采用RF溅射制备出Ba_(0.65)Sr_(0.35)TiO_3薄膜,剥离法制备出UFPA器件单元所需的图形化金属电极,TMAH溶液进行体硅腐蚀,并且使用保护胶和独特的夹具保护硅片正面免受腐蚀液的腐蚀.总结了一套制作微桥的简便可行的工艺流程,并最终在厚度为300μm的硅基片上成功的制备了厚度小于3 μm的面积为100 μm×100 μm的微桥单元结构.该微桥单元可以满足制备热释电薄膜单片式UFPA器件的要求.     

微桥结构Ni膜杨氏模量和残余应力研究

采用MEMS(MicroelectromechanicalSystems)技术研制了镍(Ni)膜微桥结构试样,应用陶瓷压条为承力单元,与纳米压痕仪XP系统的Berkovich三棱锥压头相结合,解决了较宽Ni膜微桥加载问题。测量了微桥载荷与位移的关系,并结合微桥力学理论模型得到了Ni膜微桥的杨氏模量及残余应力,其值分别为190.5GPa和146MPa,与应用纳米压痕仪直接测得的带有Si基底的Ni膜杨氏模量186.8±7.34GPa相吻合。     

非制冷红外微测辐射热计有限元模型的构建

根据微加工条件能够制造的单层和双层结构的非制冷红外微测辐射热计的尺寸，进行了有限元建模与分析，寻找出在可接受的性能与成本之间折衷的设计方案，指出气体热导是影响探测单元热导的一个主要因素，并对其进行了理论分析，给出减小气体热导的方法及这些方法在双层及单层结构中应用的可行性。     

Study of Josephson effects in microbridges of Bi-Sr-Ca-Cu-O films made by spray pyrolysis

Superconducting Bi-Sr-Ca-Cu-O (2212) films were prepared by spraying stoichiometric aqueous solutions of nitrates of bismuth, strontium, calcium and copper on heated MgO (100) substrates and subsequent annealing in air. TheR-T curves of the films show metallic behaviour above the superconducting transition temperature.T _c (R=0) is observed between 80 and 85 K. Annealing temperature has a profound effect onT _c (R=0) and on the orientation of the film. Annealing in air in near-melting region yields highly oriented films withc-axis perpendicular to the substrate. These films show a sharp superconducting transition with zero resistance at 85 K. Microbridges of the dimensions of 50 μm × 50 μm have been patterned photolithographically followed with chemical etching. The 1 V characteristics of the microbridges show Josephson effects due to the presence of grain boundary weaklinks. The temperature dependence of the critical current for these microbridges suggest formation of superconductor-normal-superconductor type weaklinks.