一种高深宽比微细槽的电火花加工工艺

为实现高深宽比微槽的加工,提出了一种自成形和扫描加工相结合的微细扁平电极制作及微细槽加工的工艺方法.采用棒状毛坯电极在一平板试件上扫描加工出一定长度的通槽,将毛坯电极沿垂直通槽方向向左和右偏移,两侧分别进行电火花反拷加工,得到扁平微细电极.再采用该扁平电极在线进行扫描加工即可得到期望的微细槽.实验获得了深径比大于18及尺寸一致性较高的阵列微细槽.与反拷或线电极磨削得到微细电极相比,自成形电极方法降低安装精度要求.而采用扁平电极进行微深槽的微细电火花加工,相对提高电极截面面积,降低电极损耗率,有利于提高加工效率.     

Challenges and Opportunities of Implantable Neural Interfaces: From Material,Electrochemical and Biological Perspectives

The desirable implantable neural interfaces can accurately record bioelectrical signals from neurons and regulate neural activities with high spatial/time resolution, facilitating the understanding of neuronal functions and dynamics. However, the electrochemical performance (impedance, charge storage/injection capacity) is limited with the miniaturization and integration of neural electrodes. The “crosstalk” caused by the uneven distribution of elctric field leads to lower electrical stimulation/recording efficiency. The mismatch between stiff electrodes and soft tissues exacerbates the inflammatory responses, thus weakening the transmission of signals. Though remarkable breakthroughs have been made through the incorporation of optimizing electrode design and functionalized nanomaterials, the chronic stability, and long-term activity in vivo of the neural electrodes still need further development. In this review, the neural interface challenges mainly on electrochemistry and biology are discussed, followed by summarizing typical electrode optimization technologies and exploring recent advances in the application of nanomaterials, based on traditional metallic materials, emerging 2D materials, conducting polymer hydrogels, etc., for enhancing neural interfaces. The strategies for improving the durability including enhanced adhesion and minimized inflammatory response, are also summarized. The promising directions are finally presented to provide enlightenment for high-performance neural interfaces in future, which will promote profound progress in neuroscience research.     

A Hybrid Strategy-Based Ultra-Narrow Stretchable Microelectrodes with Cell-Level Resolution

Stretchable ultra-narrow (e.g., 10 µm in width) microelectrodes are crucial for the electrophysiological monitoring of single cells providing the fundamental understanding to the working mechanism of neuro network or other electrically functional cells. Current fabrication strategies either focus on the preparation of normal stretchable electrodes with hundreds of micrometers or millimeters in width by using inorganic conductive materials or develop conductive organic polymer gel for ultra-narrow electrodes which suffer from low stretchability and instability for long-term implantation, therefore, it is still highly desirable to explore bio-interfacial ultra-narrow stretchable inorganic electrodes. Herein, a hybrid strategy is reported to prepare ultra-narrow multi-channel stretchable microelectrodes without using photolithography or laser-assisting etching. A 10 µm × 10 µm monitoring window is fabricated with enhanced interfacial impedance by the special rough surface. The stretchability achieves to 120% for this 10 µm-width stretchable electrode. Supported by these superior properties, it is demonstrated that the stretchable microelectrodes can detect electrophysiological signals of single cells in vitro and collect electrophysiological signals more precisely in vivo. The reported strategy will open up the accessible preparation of the fine-size stretchable microelectrode. It will significantly improve the resolution of monitoring and stimulation of inorganic stretchable electrodes.     

Modelling and measurements of the velocity gradient and local flow direction at the pore scale of a packed bed

In a packed bed with single phase liquid flow, velocity gradient and local flow direction are measured at the pore scale using tri-segmented microelectrodes flush mounted at the surface of a sphere equator area. The experimental measurements are compared to numerical predictions deduced from the solution of a 3D model based on continuity and momentum balance equations.     

介电电泳细胞分析芯片结构设计及富集效率优化

为了研制高富集效率的介电电泳细胞分析芯片,首先从介电电泳力出发,推导了悬浮细胞所受的介电电泳力公式。通过对比常规微电极的电场强度分布,选择叉指式阵列微电极构建介电电泳芯片;通过模拟不同结构参数下微通道中的电场分布对芯片结构参数进行优化设计。针对Hep G2肝癌细胞,分别分析了细胞受介电电泳力、流体力以及重力作用下的运动情况,获得了Hep G2肝癌细胞富集的初步优化条件。为了对模拟结果进行验证,采用微加工技术制作了介电电泳细胞分析芯片。以Hep G2肝癌细胞为待测样品,当芯片所施加正弦交流电压为5 V,频率为4 MHz时,获得了88.89%的富集效率。     

纳米材料与微电极生物传感器

主要阐述了利用微电子机械加工技术制作一种新型的微电极集成生物传感器 ,并利用电化学方法在微电极表面固定超微粒的纳米材料 ,检验纳米材料对生物传感器稳定性、灵敏度、响应时间等影响。这种具有纳米尺度效应的生物传感器将在生物医学领域有着广阔的应用前景。     

半导体芯片银凸点微电极生长技术

银点微电极生长技术主要用于ISS181系列高压超高速开关二极管的电极成型,是一项制约ISS181封装国产化的瓶颈技术。该项目研究采用了自主开发的流动独立供液、独立供电,整体控制工艺,用于100 mm芯片电极成型,保证银凸点微电极高度40 靘,误差?5%。做到微区银点生长有效控制,大面积一致性好。在流量8 L/min,电压6.5 V,占空比10%的条件下,得到了最佳结果。