微流控分析芯片制作中的低温键合技术

微流控分析芯片制作方法的研究是微流控分析的基础。制作性能良好的微流控分析芯片时,基片与盖片的键合技术十分重要。本文针对近年来发展迅速的低温键合技术,对各种方法进行了评价,并对其发展前景进行了展望。     

双光子加工数据准备软件的研究*

双光子加工技术需要通过数据准备软件将CAD模型转换为加工数据.为此提出了三种进行双光子加工的数据准备方法,即STL处理、图片处理和线条处理;基于MFC的单文档/视图结构框架开发了软件.应用实例表明,该软件界面友好、运行可靠.     

高深宽比SU-8微结构的简易加工技术

为了提高微驱动器的性能,提出了一种在氧化铟锡(ITO)玻璃上加工高深宽比SU-8微结构的方法.在导电玻璃的ITO层上涂覆一薄层AZ-4620正光胶,用常规的接触式曝光法,将光刻掩模上的二维图形转移到AZ-4620光胶层上,显影后利用ITO玻璃的导电性,在AZ-4620光胶曝光处电沉积镍,原掩膜图形可保真地转移到ITO玻璃表面的镍镀层上,使紫外光透过ITO玻璃基底进行反面曝光,从而保证了光刻掩模与SU-8光胶层间的完全接触,消除了厚光胶层表面不平在曝光时的散射和基片材料的反射影响,成功制备了深宽比为16、侧壁垂直度为89.5°的微结构.本方法使用设备简单,加工成本低.     

Multiphoton Lithography as a Promising Tool for Biomedical Applications

Multiphoton lithography (MPL) is a powerful and useful structuring tool capable of generating 2D and 3D arbitrary micro- and nanometer features of various materials with high spatial resolution down to nm-scale. This technology has received tremendous interest in tissue engineering and medical device manufacturing, due to its ability to print sophisticated structures, which is difficult to achieve through traditional printing methods. Thorough consideration of two-photon photoinitiators (PIs) and photoreactive biomaterials is key to the fabrication of such complex 3D micro- and nanostructures. In the current review, different types of two-photon PIs are discussed for their use in biomedical applications. Next, an overview of biomaterials (both natural and synthetic polymers) along with their crosslinking mechanisms is provided. Finally, biomedical applications exploiting MPL are presented, including photocleaving and photopatterning strategies, biomedical devices, tissue engineering, organoids, organ-on-chip, and photodynamic therapy. This review offers a helicopter view on the use of MPL technology in the biomedical field and defines the necessary considerations toward selection or design of PIs and photoreactive biomaterials to serve a multitude of biomedical applications.     

激光微技术的发展现状

介绍了激光微加工技术的特点,与其它微加工技术相比,激光微加工具有非接触、有选择性加工、热影响区域小、高精度与高重复率等优点,既可以通过去除方式,也可以通过材料堆积进行微加工成型。综述了几种常用的激光微加工技术及其发展趋势,微机电系统（MEMS）技术的进一步成熟,必将带动激光微技术快速发展。     

多晶硅微机械零件的制作及测试

探讨利用硅表面微细加工工艺制造微型机械的方法，制作了微涡轮，微传动齿轮，微螺旋弹簧和微凸轮传动机构等微机械结构，实现了齿轮的啮合传动，微弹簧扭转及微凸轮传动机构的运动。对多晶硅材料的机械物理性能，微机械系统动力学特性进行了测试分析。