Optimization of Selective Epitaxial Growth of Silicon in LPCVD

Selective epitaxial growth (SEG) of silicon has attracted considerable attention for its good electrical properties and advantages in building microstructures in high‐density devices. However, SEG problems, such as an unclear process window, selectivity loss, and nonuniformity have often made application difficult. In our study, we derived processing diagrams for SEG from thermodynamics on gas‐phase reactions so that we could predict the SEG process zone for low pressure chemical vapor deposition. In addition, with the help of both the concept of the effective supersaturation ratio and three kinds of E‐beam patterns, we evaluated and controlled selectivity loss and nonuniformity in SEG, which is affected by the loading effect. To optimize the SEG process, we propose two practical methods: One deals with cleaning the wafer, and the other involves inserting dummy active patterns into the wide insulator to prevent the silicon from nucleating.     

Menke条件下甲苯的固体酸催化选择性硝化

在Ｍｅｎｋｅ条件下，固体酸能对硝酸盐硝化甲苯的位置选择性产生影响，在所选的几种固体酸中皂土和高岭土是较好的对位选择性硝化催化剂，能使硝化产物的对邻比率达１．１～１．５。     

含氮化合物废气选择性催化氧化技术研究进展

通过对当前含氮化合物废气治理技术的对比分析,总结选择性催化氧化的相关技术优势。根据对含氮化合物的种类及来源分析,介绍氨气、腈类、胺类及其他含氮化合物的催化净化技术。重点总结催化剂的种类、研发进展和在实际使用中可能遇到的问题,同时展望含氮化合物废气选择性催化氧化技术的研发方向。     

Selective and nonselective wet etching of Zn0.9Mg0.1O/ZnO

Wet etch rates at 25°C for Zn_0.9Mg_0.1O grown on sapphire substrates by pulsed laser deposition (PLD) were in the range 300–1100 nm · min⁻¹ with HCl/H₂O (5×10⁻³−2×10⁻² M) and 120–300 nm · min⁻¹ with H₃PO₄/H₂O (5×10⁻³−2×10⁻² M). Both of these dilute mixtures exhibited diffusion-limited etching, with thermal activation energies of 2–3 kCal · mol⁻¹. By sharp contrast, the etch rates for ZnO also grown on sapphire by PLD were much slower in similar solutions, with rates of 1.2–50 nm · min⁻¹ in HCl/H₂O (0.01–1.2 M) and 12–54 nm · min⁻¹ in H₃PO₄/H₂O (0.02–0.15 M). The etching was reaction limited over the temperature range 25–75°C, with activation energies close to 6 kCal · mol⁻¹. The resulting selectivity of Zn_0.9Mg_0.1O over ZnO can be a high as ∼400 with HCl and ∼30 with H₃PO₄.     

Synthesis of ZSM-5 zeolite membranes without organic templates using a varying-concentration technique

Template-free nanosized ZSM-5 seeds with an average size of 15 nm were prepared from a synthesis solution with the composition 12Na2O:100SiO2:2Al2O3:2500H2O. By the use of these seeds, thin ZSM-5 zeolite membranes were prepared on the outer surface of a porous α-alumina tube with a pore size of 2 μm in a gel system by varying-concentration synthesis with organic-free template. The first composition synthesis sol-gel was the same as seeds of molar composition and the second one was 12Na2O:100SiO2:2Al2O3:5000H2O at 180 ℃ for 10 h, respectively. XRD shows that the film consists of well-crystallized ZSM-5 zeolite. SEM investigation indicats that the zeolite films on the supports are defect free and the film thickness is approximately 8 μm. The permeances for H2, N2, CH4 and CO2 are 8.94×10-7 , 3.27×10-7 , 3.9×10-7 , 3.14×10-7 and 0.874×10-7 mol·m2·s-1·Pa-1 , respectively. The ideal selectivity of membrane at room temperature for H2/CO2, H2/N2, H2/CH4 are 2.84, 2.73 and 2.29, respectively.     

In situ FTIR spectroscopy on rhodium-exchanged NaX zeolite with different metal dispersion during syngas reaction

In situ FTIR spectroscopy has been applied to study the reason of the different selectivity behaviour of rhodium in the CO hydrogenation reaction in dependence on the different particle size. Several forms of molecularly adsorbed CO are observed, such as linearly- and bridgedbonded CO on metallic rhodium as well as dicarbonyl species with Rh(I) centres formed by oxidation of Rh(0) with protons in presence of CO. Furthermore, non-reactive formate, acetate, and carbonate species are produced as side products of the reaction. The higher selectivity to oxygenates, particularly to methanol, is explained by the existence of multiple-bonded CO present only on small rhodium crystallites. The multiple-bonded CO formed at low temperatures is converted at higher temperatures to the highly reactive formyl species, which is hydrogenated to methanol.     

HZSM5分子筛膜复合二氧化锡对甲烷的气敏性能研究

采用液相氧化法制备二氧化锡纳米颗粒,并利用浸渍法制备Pd负载二氧化锡纳米材料,通过丝网印刷得到气敏传感膜并在其表面印刷分子筛层。基于动态气敏测试系统探究传感器对甲烷气体的灵敏度及其在CO和乙醇干扰气体下的选择性。研究结果表明,在Pd-SnO₂敏感层表面印刷Pd-HZSM5层后,传感器对甲烷的响应能力显著提高,并且在体积分数为5×10^-4的CO存在时,对甲烷的选择性也得到明显的提升。同样,在质量分数为2×10^-5乙醇的存在下,传感器对甲烷的响应也没有受到干扰。通过对分子筛进行表征和催化分析,发现Pd-HZSM5对CO的催化效率可达100%,使得CO在扩散过程中被催化氧化,这可能是印刷Pd-HZSM5分子筛膜从而提高传感器选择性的主要原因。同时研究还表明,在敏感层表面印刷分子筛层并不会影响传感器的响应和恢复速率。     

N-甲酰吗啉芳烃抽提塔试验研究

用小型碳钢筛板萃取塔进行了宽馏分重整脱庚烷油的N 甲酰吗啉抽提试验 ,考察了抽提温度、溶剂比、溶剂含水率对总芳烃收率及选择性的影响。结果表明 ,在抽提温度为 60℃、溶剂含水为 3 % (m )和溶剂比S/F =4(V)的抽提操作条件下 ,溶剂选择性较高 ,并可获得高的芳烃回收率     

太阳能吸热功能膜材质

材质中电子能级和振转能级决定光谱的选择性。     

Cellulose acetate reverse osmosis membranes: Optimization of the composition

Membranes based on cellulose acetate for reverse osmosis can possibly be applied to the so‐called salinity process of energy generation and water desalinization. The requirements for membranes for these two different applications are a relatively high water flux and low salt permeability. In this article, we present the optimization of the composition of such membranes. We started by producing membranes with a patented casting solution with the following composition: 45.77 wt % dioxane, 17.61 wt % acetone, and 8.45 wt % acetic acid (solvents); 14.09 wt % methanol (nonsolvent); and 7.04 wt % cellulose diacetate and 7.04 wt % cellulose triacetate. The membranes produced with this solution were analyzed comparatively, with the membranes obtained by the introduction of modifications to the following parameters: the solvent mix, the nonsolvent mix, the proportion of cellulose diacetate and cellulose triacetate in the casting solution, and the addition of reinforcing cellulose fibers. The results led us to conclude that the best membrane formulation had the following composition: 45.77 wt % dioxane, 17.61 wt % acetone, and 8.45 wt % acetic acid (solvents); 4.22 wt % cellulose triacetate and 9.86 wt % cellulose diacetate (polymers); 14.09 wt % methanol (nonsolvent); and 0.5 wt % cellulose fibers (with respect to the total polymer content). © 2006 Wiley Periodicals, Inc. J Appl Polym Sci 100: 4052–4058, 2006