X射线干涉光刻光束线关键光学元件热-结构耦合分析

为了保证上海光源X射线干涉光刻光束线的稳定性,减小热变形对实验结果的影响,对X射线干涉光刻光束线的3个关键光学元件——偏转镜、聚焦镜和精密四刀狭缝进行热-结构耦合分析。首先,计算偏转镜、聚焦镜和精密四刀狭缝所承载的功率密度;然后,建立其有限元模型;最后,获得光学元件的温度场和热变形的结果。结果表明,偏转镜和聚焦镜采用间接水冷方式可有效抑制热变形,冷却后的最大面形误差分别为7.2μrad和9.2μrad。精密四刀狭缝未冷却时,刀片组件温度介于271.56~273.27℃,刀口热变形为0.19 mm,直线导轨热变形为0.08 mm;经过铜辫子冷却后,刀片组件温度降至22.24~23.94℃,刀口热变形降至0.2μm,直线导轨热变形降至0.1μm;采用影像法和接触探头法测试后,刀口直线度、平行度和重复精度均满足技术要求。偏转镜、聚焦镜和精密四刀狭缝的热变形通过间接水冷和铜辫子的冷却方式可以得到很大程度的抑制,进而保证光斑质量。     

激光晶体Nd:YVO4的形貌及生长缺陷

本文报道了应用环境扫描电镜（ESEM）和同步辐射X射线白光形貌术对采用提拉法生长出的Nd:YVO4晶体进行的形貌及生长缺陷的分析,获得了该晶体的开裂表面的ESEM形貌像以及取自晶体肩部和中间部位的（001）面的同步辐射白光形貌像,观察到了位错、包裹物等缺陷,可为生长高质量的Nd:YVO4晶体提供重要的启示.     

Fast microwave detection system for coherent synchrotron radiation study at KEK: Accelerator test facility

A fast room temperature microwave detection system based on the Schottky Barrier-diode detector was created at the KEK ATF (Accelerator Test Facility). It was tested using Coherent Synchrotron Radiation (CSR) generated by the 1.28 GeV electron beam in the damping ring. The speed performance of the detection system was checked by observing the CSR from a multi-bunch (2.8 ns bunch separation time) beam. The theoretical estimations of CSR power yield from an edge of bending magnet as well as new injection tuning method are presented. A very high sensitivity of CSR power yield to the longitudinal electron distribution in a bunch is discussed.     

降低紧密纺色织物浆纱断头的几项措施

为了降低紧密纺色织品种的浆纱断头,提高产品质量,分析了该品种在浆纱过程中产生断头的原因,介绍了在操作方面应采取的措施及在工艺方面应注意的问题.通过适当加大干分绞区张力及前浆槽纱线的喂入张力、预烘张力,单独控制前浆槽的浆液粘度,确保回潮率满足工艺要求,有效解决了紧密纺色织品种浆纱断头问题,提高了织轴质量.     

The topographic normalization of hyperspectral data: implications for the selection of spectral end members and lithologic mapping

Compact Airborne Spectrographic Imager (CASI) hyperspectral data is used to investigate the effects of topography on the selection of spectral end members, and to assess whether the topographic correction improves the discrimination of rock units for lithologic mapping. A publicly available Digital Elevation Model (DEM), at a scale of 1:50,000, is used to model the radiance variation of the scene as a function of topography, assuming a Lambertian surface. Skylight is estimated and removed from the airborne data using a dark object correction. The CASI data is corrected on a pixel-by-pixel basis to normalize the scene to a uniform solar illumination and viewing geometry. The results show that topography has the effect of expanding end member clusters at times resulting in the overlap of clusters and that the correction process can effectively reduce the variation in detected radiance due to changes in local illumination. When topographic effects are embedded in the hyperspectral data, methods typically used for the selection of end members, such as the convex hull method, can miss end members or result in the selection of nonrepresentative pixels as end members. Thus, end members selected by some conventional methods are very likely “incomplete” or “nonrepresentative” if the topographic effect is embedded in the data. As shown in this study, the topographic correction can reveal hidden end members and achieve a better representation of end members via the statistical center of isolated clusters.     

化学结构式的拓扑描述

化学结构式的拓扑描述,是化学信息计算机化的手段之一。这里系统地建立了一整套的连接表(三类:紧缩连接表、冗余连接表、和连接方阵),用来进行结构式中原子之间连接关系的拓扑描述,对分子结构进行数值化。同时,阐述了连接表唯一化的方法,并介绍了不同类型连接表之间的转换关系和还原为平面结构式图形的绘图程序。     

同步辐射x射线光刻制作深亚微米T形栅

x射线光刻非常适合用于深亚微米T形栅的制作,这是因为它的高分辨率、大的曝光视场和高的生产效率足以满足MMIC制造工艺的要求。本文中我们首先对我们的x射线掩模制造工艺进行介绍,然后论述了一种用于制造深亚微米T形栅的两层胶工艺,介绍了所取得的一些研究结果,最后对国内的深亚微米光刻现状进行了简要分析。     

同步辐射光刻技术

同步辐射光刻有希望代替传统光刻技术,用于0.25μm以下图形的超精细加工。本文叙述了它的原理、相关技术的开发现状和工艺应用。     

Mesomorphism of Lanthanide(Ⅲ) 4-Hexyloxybenzoates

The 4-alkoxybenzoic acids are well-known liquid crystals showing several mesophases(nematic,smectic C phase or both)depending on the alkoxy chain length and whereby the rigid core of the mesogen is formed by intermolecular hydrogen bonds.In this paper it is shown that the thermal behaviour of lanthanide salts of 4-hexyloxybenzoic acids depends on the lanthanide ion(Ln=La,Pr,Nd,Sm,Eu).The lanthanum(Ⅲ)and praseodymium(Ⅲ)4-hexyloxybenzoates exhibit a smectic A mesophase.No mesophase is found for the corresponding compounds of heavier lanthanides.The thermal properties of the lanthanide(Ⅲ)4-hexyloxybenzoates were investigated by differential scanning calorimetry(DSC),polarising thermo-optical microscopy and synchrotron X-ray radiation.