混合集成型光学拾音器的设计与制作

通过混合集成型结构光学拾音器的光学设计和芯片设计，制作了包含微光学棱镜，光电探测器和信号放大电路的混合集成型光学拾音器。经过测试，发现有较好的信号输出特性，表明混合集成型光学拾音器已基本研制成功。     

组合式熔凝石英微透镜阵列-线列Yba_2Cu_3O_(7-δ)高温超导薄膜红外探测器的研究

采用准分子激光扫描消融法淀积YB32C23O7-δ高温超导薄膜,利用常规光刻工艺制备线列高温超导薄膜器件,采用离子束刻蚀制备与高温超导薄膜器件匹配的熔凝石英微透镜阵列,测试了微透镜／高温超导薄膜器件所构成的混合结构在1～5μm红外波段的几项重要的光响应特性．     

8相位256×256衍射微透镜的设计与制作

介绍了衍射微透镜阵列的设计原理与制作工艺方法，在此基础上研制出适用于 ３～５ μｍ波长２５６×２５６ ＰｔＳｉ红外焦平面的 ８相位 ２５６×２５６硅衍射微透镜阵列，阵列中微透镜的孔径为 ５０μｍ，透镜 Ｆ数为 ｆ／２．５，微透镜阵列的中心距为 ５０μｍ。实测衍射效率大于 ８０％，能在红外波前传感器中较好应用。     

微透镜阵列显示技术研究

通过对微透镜阵列结构进行深入研究,揭示了微透镜阵列对微图形的放大原理。并在此基础上,找到了微透镜阵列结构参数、微图形结构参数与微图形阵列移动速度、移动方向以及放大倍率之间的关系,利用微透镜阵列实现了对微图形放大、动态、立体的显示。     

中波10μm小间距原位集成微透镜技术

原位集成微透镜能够在不改变封装结构的情况下,实现对入射光的汇聚效果,有效提升信号并降低串音,对于中波10μm小间距碲镉汞焦平面探测器的性能提升具有重要意义。本文设计并制备出了10μm小间距原位集成微透镜,成功实现了信号增强效果,器件的噪声等效温差(NETD)得到有效降低。     

红外焦平面用面阵微透镜的氩离子束刻蚀制作

讨论了制作大面阵矩底拱面状微透镜阵列的工艺条件，给出了氩离子束刻蚀制作红外焦平面用面阵微透镜的离子束刻蚀速率的经验关系式，通过实验获得了光电材料几种常用的氩离子束刻蚀速率与氩离子束能量之间的关系曲线，用扫描电子显微镜测量了所制微透镜阵列的微结构形貌特征。     

Organic Light‐Emitting Diode Sensing Platform: Challenges and Solutions

The organic light‐emitting diode (OLED)‐based sensing platform is gaining momentum due to unique attributes of the compact OLEDs that are used as excitation sources. This paper, however, points to issues related to this sensing platform that will affect many (bio)chemical sensing applications, in particular in photoluminescence (PL)‐based sensors operated in the advantageous time domain, where pulsed OLEDs are utilized. The issues are related to the post‐pulse electroluminescence (EL) profile, i.e., transient EL, which depends on the OLED materials and structure, and to the long‐wavelength tail of the typically broad‐band EL spectrum. Depending on materials and device structure, the transient EL may exhibit spikes peaking at ～100–200 ns and μs‐long tails. As shown, these interfere with the determination of PL decay times (that are related to analyte concentrations) of sensing elements. The results also indicate that the long‐wavelength tail of the EL spectrum contributes to the interfering post‐pulse μs‐long EL tail. Hence, it is shown that the choice of OLED materials, the use of microcavity (μC) OLEDs with tunable, narrower EL bands, and the use of UV OLEDs alleviate these issues, resulting in more reliable data analysis. Furthermore, a 2‐D uniform 2 μm‐pitch microlens array that was previously used for improving light extraction from the OLEDs (J.‐M. Park et al., Optics Express 2011 , 19, A786) is used for directional PL scattering toward the photodetector, which leads to a ～2.1–3.8 fold enhancement of the PL signal. This behavior is shown for oxygen sensing, which is the basis for sensing of bioanalytes such as glucose, lactate, ethanol, cholesterol, and uric acid.     

平面交叉型微透镜阵列的制作及成像特性研究

介绍了采用光刻离子交换工艺制作平面交叉型微透镜阵列的方法。利用积分形式的光线方程式讨论了平面交叉型微透镜的近轴光学特性，研究了微透镜的光线轨迹方程式和一些重要的近轴成像特性，利用ABCD定理得到了平面交叉型微透镜像距、焦距、像高、横向放大率和主平面位置的数学表达式，焦距的理论计算结果和实验数据吻合得很好。     

Sensitivity and crosstalk study of the zero gap microlens used in 3.2 μm active pixel image sensors

The microlens has been widely applied to improve the sensitivity and to decrease the spatial crosstalk of image sensors. In order to further decrease the pixel size while improve the image quality, the zero gap microlens has been proposed to make high performance image sensors. In this paper, both the traditional microlens and zero gap microlens are fabricated using TOWER and TOPPAN processes. And their performances are compared and evaluated. The results show that the least sensitivity of the zero gap microlens has been significantly improved by more than 45.8% compared to that of the traditional microlens. The use of the zero gap microlens results in an obvious decrease of the crosstalk among blue, green and red lights. For example, the crosstalk of blue light in red light under the green irradiation has been decreases about 1.33%, and the crosstalk of red light in blue light under the blue irradiation has showed about 2.429 times decrease. Overall, the output colour image of the zero gap microlens is brighter and clearer than that of the traditional microlens. Image quality has been significantly improved due to the use of the zero gap microlens.     

微透镜列阵的离子束刻蚀及衍射效率测量

采用Kaufman离子刻蚀微透镜列阵并采用实时检测系统对刻蚀深度进行了控制.提出了测量微透镜列阵衍射效率的一种方法,对测量误差进行了讨论.