| 脉冲激光沉积氢化锂薄膜(英文) |
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| 引用本文： | 雷洁红,邢丕峰,唐永建,吴卫东,王锋. 脉冲激光沉积氢化锂薄膜(英文)[J]. 材料工程, 2009, 0(Z2) |
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| 作者姓名： | 雷洁红 邢丕峰 唐永建 吴卫东 王锋 |
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| 作者单位： | 中国工程物理研究院; |
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| 摘 要： | 用脉冲激光沉积制备了氢化锂薄膜,对薄膜的结构和表面形貌进行了,给出了氢气压和靶基距与沉积速率的关系。运用扫描电镜和X射线衍射仪测试薄膜的性质。测试结果显示,氢气压为10-1mbar时,薄膜表面粗糙且呈现多晶态。对薄膜粗糙度与氢气压的关系进行了讨论。
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| 关 键 词： | 脉冲激光沉积 LiH薄膜 结构性质 表面形貌 |
Preparation of LiH Thin Films by Pulsed Laser Deposition |
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| LEI Jie-hong,XING Pi-feng,TANG Yong-jian,WU Wei-dong,WANG Feng. Preparation of LiH Thin Films by Pulsed Laser Deposition[J]. Journal of Materials Engineering, 2009, 0(Z2) |
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| Authors: | LEI Jie-hong XING Pi-feng TANG Yong-jian WU Wei-dong WANG Feng |
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| Affiliation: | LEI Jie-hong,XING Pi-feng,TANG Yong-jian,WU Wei-dong,WANG Feng(Research Center of Laser Fusion of CAEP,Mianyang 621900,China) |
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| Abstract: | We have deposited lithium hydride(LiH)films by pulsed laser deposition,and have investigated structure and surface morphology of the films.The influence of hydrogen-gas pressure and substrate-target distance on the deposition rate have been given.The film properties have been characterized by scanning electron miscroscopy(SEM)and X-ray diffraction(XRD).The scanning electron miscroscopy and X-ray diffraction spectra show surface of films are generally rough and films deposited in the presence of a gas pressu... |
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| Keywords: | Pulsed laser deposition LiH film Structural properties Surface morphology |
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