大功率Slab CO_2激光器光束质量的测量

为了充分了解SlabCO2激光器的光束质量,采用LASERSCOPEUFF100光束光斑质量检测仪对SlabCO2激光器的光束质量进行了全面的测量研究.从激光束通过飞行光学导光系统(flyingoptits)前后的光束质量测量、聚焦后光斑的质量测量以及焦点漂移4个方面全面考察了SlabCO2激光器的光束质量.测量结果表明:SlabCO2激光器的光束质量因子M2约为1.1,光束横截面的强度分布接近基模高斯分布;激光束经过长距离的导光系统传输后仍能保持光束横截面的强度分布,采用焦距为190.5mm的聚焦镜,聚焦光斑的半径约83μm;在工作范围内(x:0-3m)的焦点漂移量约为1mm.

Measurement on Beam Quality of High-power Slab CO2 Laser

The beam quality of high-power Slab CO2 laser was measured using LASERSCOPE UFFIOO from the aspects of the raw beam and focal beam. The measurement experiments had been done before and after the laser beam passing through the flying optics. And the beam quality of focal beam and focal shift were measured. The measurement results show that the M2 factor of focal beam is about 1.1, its beam transverse intensity profile is approaching the ideal Gauss profile, the laser beam can propagate a long way without divergence, the focal beam waist radius is 83 μm when the focal length is 190.5 mm, and the focal shift is about 1 mm in the range of processing (x:0-3 m).