| 基片开槽抑制SAW滤波器体声波的工艺研究 |
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| 引用本文： | 张传志. 基片开槽抑制SAW滤波器体声波的工艺研究[J]. 压电与声光, 2002, 24(1): 4-7 |
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| 作者姓名： | 张传志 |
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| 作者单位： | 四川压电与声光技术研究所,重庆,400060 |
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| 摘 要： | 当叉指换能器在基片上激励声表面波模式时，同时伴随着体声波的激励。文章根据叉指换能器的激励原理，采取对压电基片背面开槽抑制叉指换能器体声波进行了实验研究。分别在ST、LT、LN压电基片上背面开槽并制作了中心频率为28MHz、70MHz、71MHz、120MHz声表面波滤波器。实验观察了体声波的抑制情况，并得出了具体实验数据。
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| 关 键 词： | 体波抑制 叉指换能器 声表面波 基片开槽 SAW滤波器 |
| 文章编号： | 1004-2474(2002)01-0004-04 |
| 修稿时间： | 2001-07-05 |
Research on Suppressing BAW in SAW Filter by Grooving on the Back of the Substrate |
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| ZHANG Chuang zhi. Research on Suppressing BAW in SAW Filter by Grooving on the Back of the Substrate[J]. Piezoelectrics & Acoustooptics, 2002, 24(1): 4-7 |
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| Authors: | ZHANG Chuang zhi |
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| Abstract: | When SAW is excited by the IDTs on the substrate,and BAW is excited as well Based on this principle,experiments to suppress BAW have been done by grooving on the back of the substrates such as ST,LT,LN with the filter center frequency of 28 MHz,70 MHz,71 MHz,120 MHz respectively The BAW suppression is observed and the experimental results are also given in this paper |
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| Keywords: | BAW suppression IDT SAW |
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