制备过程对掺铝氧化锌薄膜性质的影响

文章采用溶胶-凝胶法在玻璃基底上制备得到了高透光率,高导电性的掺铝氧化锌薄膜（AZO）,利用原子力显微镜、扫描电镜、X射多次退火的制备过程不仅可以得到可见光区透光率大于85%,电阻率为7.2×10-5Ω·m的透明导电薄膜,而且因省略了热处理过程而简化了制备工艺,缩短了制膜时间。线衍射仪和紫外可见分光光度计等研究了三种不同的制备过程对AZO性质的影响。结果表明,制备过程的不同导致了薄膜的表面形貌、结构和导电性质方面的差别,其中分层多次退火过程有利于晶粒长大,形成结晶度高且具有单一（002）取向的AZO薄膜,同时改善薄膜的导电性能。分层

Effect of Preparing Process on Properties of Aluminum-doped Zinc Oxide Thin Films

Transparent conducting aluminum-doped zinc oxide（AZO） thin films have been prepared by the sol–gel method on glass substrate,and the effect of preparing process on the properties of the films was investigated by AFM,SEM,XRD,and UV-VIS spectrum.It was observed that the preparing process change would change the surface morphology,crystal structure and conductivity of the AZO films.Layered short-time repetitious anneal was demonstrated to be beneficial for the film crystalline and the crystallite size enhancement.As a result,single oriented film with（002） axis and high conductivity was easy to be obtained.A high conductive AZO film with resistivity of 7.2×10-5 Ω·m and visible light transmittance above 85 % was prepared by this method.