| 一种新的微机械陀螺品质因数测试方法 |
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| 引用本文： | 徐淑静,高振宁. 一种新的微机械陀螺品质因数测试方法[J]. 微纳电子技术, 2011, 48(6): 391-394. DOI: 10.3969/j.issn.1671-4776.2011.06.008 |
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| 作者姓名： | 徐淑静 高振宁 |
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| 作者单位： | 中国电子科技集团公司第十三研究所,石家庄,050051 |
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| 摘 要： | 传统的微机械陀螺采用扫频方法测试结构的品质因数,存在耗时长、测量效率低和精度差等问题.提出了一种新的品质因数测量方法,该方法的原理是通过对陀螺的驱动端施加一个激励脉冲,采集驱动检测端的相应衰减信号,并通过处理得到衰减信号的频率和斜率,从而检测陀螺的品质因数.采用自行设计的激励电路,外购NI公司的高速采集卡和基于LabV...
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| 关 键 词： | 微电子机械系统(MEMS) 陀螺 品质因数 数字采集卡 LabVIEW |
A New Test Method for the Quality Factor of MEMS Gyroscopes |
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| Xu Shujing,Gao Zhenning. A New Test Method for the Quality Factor of MEMS Gyroscopes[J]. Micronanoelectronic Technology, 2011, 48(6): 391-394. DOI: 10.3969/j.issn.1671-4776.2011.06.008 |
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| Authors: | Xu Shujing Gao Zhenning |
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| Affiliation: | Xu Shujing,Gao Zhenning(The 13th Research Institude,CETC,Shijiazhuang 050051,China) |
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| Abstract: | The traditional test method for the quality factor of MEMS gyroscopes using the sweeping frequency has some defects,such as long measuring time,low efficiency and poor precision.A new test method for the quality factor of MEMS gyroscopes was presented.The principle of this method is applying an exciting pulse to the driving part of the gyroscope,and acquiring the corresponding damped signal from the driving detection part.The frequency and slope of this damped signal were calculated through the process of t... |
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| Keywords: | micro-electromechanical system(MEMS) gyroscope quality factor data acquisition card LabVIEW |
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