A micromachined inline type microwave power sensor with working state transfer switches |
| |
| Authors: | Han Lei Key Laboratory of MEMS of Ministry of Education Southeast University Nanjing China |
| |
| Affiliation: | Han Lei Key Laboratory of MEMS of Ministry of Education,Southeast University,Nanjing 210096,China |
| |
| Abstract: | A wideband 8-12 GHz inline type microwave power sensor,which has both working and non-working states,is presented.The power sensor measures the microwave power coupled from a CPW line by a MEMS membrane.In order to reduce microwave losses during the non-working state,a new structure of working state transfer switches is proposed to realize the two working states.The fabrication of the power sensor with two working states is compatible with the GaAs MMIC(monolithic microwave integrated circuit) process.The e... |
| |
| Keywords: | microwave power sensor micromachined GaAs MMIC transfer switches |
| 本文献已被 CNKI 等数据库收录！ |
| 点击此处可从《半导体学报》浏览原始摘要信息 |
|
点击此处可从《半导体学报》下载全文 |
