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Holographic fabricated continuous wave operation of distributed feedback quantum cascade lasers atλ≈8.5μm
作者姓名:张锦川  王利军  张伟  刘万峰  刘俊岐  刘峰奇  李路  王占国
作者单位:Key Laboratory of Semiconductor Materials Science;Institute of Semiconductors;Chinese Academy of Sciences;Department of Electronic Engineering;Tsinghua University;
基金项目:Project supported by the National Research Projects of China(Nos60525406,60736031,60806018,60906026,2006CB604903, 2007AA03Z446,2009AA03Z403)
摘    要:The fabrication and characterization of distributed feedback(DFB) quantum cascade lasers emitting atλ≈8.5μm are reported.The first-order DFB grating structure was defined using the holographic lithography technique.Reliable dynamic single-mode emission with a side-mode suppression ratio of 20 dB and a tuning coefficient of-0.277 cm-1/K from 93 to 210 K is obtained in continuous wave mode by using high-reflectivity coating on the rear facet.The output power is over 100 mW at a temperature of 80 K.

关 键 词:quantum cascade laser  distributed feedback  holographic  continuous wave
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