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Influence of growth temperatures on the quality of InGaAs/GaAs quantum well structure grown on Ge substrate by molecular beam epitaxy
Authors:He Jifang  Shang Xiangjun  Li Mifeng  Zhu Yan  Chang Xiuying  Ni Haiqiao  Xu Yingqiang  Niu Zhichuan
Affiliation:State Key Laboratory for Superlattices and Microstructures, Institute of Semiconductors, Chinese Academy of Sciences, Beijing 100083, China
Abstract:Molecular beam epitaxy growth of an In_xGa_(1-x)As/GaAs quantum well(QW) structure(x equals to 0.17 or 0.3) on offcut(100) Ge substrate has been investigated.The samples were characterized by atomic force microscopy,photoluminescence(PL),and high resolution transmission electron microscopy.High temperature annealing of the Ge substrate is necessary to grow GaAs buffer layer without anti-phase domains.During the subsequent growth of the GaAs buffer layer and an In_xGa_(1-x)As/GaAs QW structure,temperature pl...
Keywords:Ge substrate  InGaAs/GaAs quantum well  molecular beam epitaxy  
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