Design and fabrication of a MEMS Lamb wave device based on ZnO thin film |
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Authors: | Liu Mengwei Li Junhong Ma Jun Wang Chenghao |
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Affiliation: | Institute of Acoustics, Chinese Academy of Sciences, Beijing 100190, China |
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Abstract: | This paper presents the design and fabrication of a Lamb wave device based on ZnO piezoelectric film. The Lamb waves were respectively launched and received by both Al interdigital transducers.In order to reduce the stress of the thin membrane,the ZnO/Al/LTO/Si_3N_4/Si multilayered thin plate was designed and fabricated.A novel method to obtain the piezoelectric constant of the ZnO film was used.The experimental results for characterizing the wave propagation modes and their frequencies of the Lamb wave dev... |
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Keywords: | Lamb wave MEMS ZnO film composite plate |
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