凸非球面辅助面的背向零位检验分析

在现代光学检测中，凸非球面的检测一直是一个难点。辅助面的背向零位检测方法，从三级像差理论出发，通过计算非球面的法距差，来探讨辅助面对凸非球面法距差的补偿校正能力。这种检验方法可用于 的凸非球面。辅助面有两个作用，其一为将实体非球面的球心引入到空气中;其二则为辅助面与凸非球面的组合可以补偿凸非球面的法距差。通过理论分析与zemax编程计算得出当 时非球面的 值均优于 .在工程实际应用中，通过此方法检测的凸非球面面形精度优于 。可以得出辅助面对凸非球面的法距差具有一定的补偿能力这一结论。

Convex Asphere Back Null Compensation Testing With Auxiliary Surface

Convex aspheric surface testing is very difficult. In order to obtain better wavefront error, a method including back null compensation with auxiliary surface is proposed. This method, basing on third-order aberration theory, study the ability of auxiliary surface to compensate the normal aberration of convex asphere, in which . There are two functions of the auxiliary surface. One is to make the center of the asphere locate in the air. The second is using the combination of auxiliary surface and convex aspheric surface to compensate the normal aberration of convex asphere. When , the value of RMS, which is calculated by theory and Zemax, is better than . Furthermore , the surface figure accuracy can be practically reach by using above testing method. In conclution, this letter proved that back null compensation with auxiliary surface testing is able to achieve better wavefront error.