微细电火花加工装置关键技术研究

围绕微细点火花加工的关键技术，开发出了具有4轴3联动的微细电火花加工装置。阐述了利用该装置实现微细电火花加工的关键技术和实现途径。包括微能脉冲电源的设计实现；通过选择适当的伺服控制策略，解决了伺服机构在小位移进给时所存在的爬行问题；探索了微细电极的在线制作与检测方法，并分析了在线检测方法存在的误差。在该装置上进行了大量的加工试验，试验已加工出最小直径为12 mm的微细轴和25 mm的微细孔，并实现了具有空间自由曲面的，大小为1 mm×0.3 mm×0.18 mm微脸谱雕塑的加工。

STUDY ON KEY TECHNIQUES OF MICRO-EDM EQUIPMENTS

The micro-EDM equipments with three linked axes are developed. The key technique and realization approach of micro-EDM using the equipment are also discussed. The micro-energy pulse power source satisfied with versatile demands is designed by the analysis of the realization approach. To solve the crawl problem of servo mechanism at small feed, a suitable control strategy is applied in the equipment. The microelectrode on-line fabrication and measure is studied and the error of on-line measure is also discussed. The micro-shaft with minimum diameter 12 μm and the micro-hole with minimum diameter 25 μm can be machined stably through lots of experiments on the equipment. And a micro-facial sculpture with free space curved surface and size 1 mm×0.3 mm×0.18 mm is also machined successfully.