基于静电驱动NEMS混频器结构设计与分析

提出了一种采用新型纳米梁结构利用静电驱动实现混频的NEMS混频器的工作原理。通过在两个双端固支梁中间加一平板质量块作为静电驱动与检测输出电极,可以明显提高纳米尺度下静电驱动静电力的大小以及电容信号输出强度,减少平板电容边缘效应的影响。采用双梁结构对于中间质量块而言回复力得到了提高,有利于提高谐振频率同时有效地抑制了梁扭转模态的干扰。在详细分析双梁结构静电驱动信号选取方式以及真空下动力学模型基础上,利用Lindstedt-Poincare方法推导出系统的幅频关系式。

Design and Anslysis of a Electrostatic Actuated NEMS Mixer

We proposed and discussed a principle of electrostatic mechanical mixer by use of a new nano beam structure.The results indicated that,by increasing the size of plates the driving force is raised.The amplitude-frequency curve complied with the requirements of a mixer.Also the device effectively increased the resonant frequency because of the increasing coefficient of elasticity double.On the basis of detailed analysis on the drive signal and the equation of motion,we get the amplitude-frequency characteristic and other important relationship by Lindstedt-Poincare method.