| 真空微电子器件及其研究进展 |
| |
| 引用本文： | 郭宝增.真空微电子器件及其研究进展[J].微电子学,1993,23(6):10-16. |
| |
| 作者姓名： | 郭宝增 |
| |
| 作者单位： | 河北大学电子与信息工程系 河北保定071002 |
| |
| 摘 要： | 由于真空微电子器件具有十分诱人的应用前景,近几年引起了人们的极大兴趣,成为电子器件发展的一个重要分支和前沿。本文叙述真空微电子器件的特点,原理、应用和最新研究成果。
|
| 关 键 词： | 真空微电子学 微电子器件 场发射 |
Vacuum Microelectronic Devices and Their Latest Progresses |
| |
| Guo Baozheng
Dept. Electronic and Information Engineering,Hebei Unix. ,Baoding. Hebei.Vacuum Microelectronic Devices and Their Latest Progresses[J].Microelectronics,1993,23(6):10-16. |
| |
| Authors: | Guo Baozheng
Dept Electronic and Information Engineering Hebei Unix Baoding Hebei |
| |
| Affiliation: | Guo Baozheng
Dept. Electronic and Information Engineering,Hebei Unix. 071002,Baoding. Hebei |
| |
| Abstract: | Vacuum microelectronic devices,which have aroused great interest in recent years due to their promising applications, have become one of the leading edge electronic devices. This paper deals with the principle of operation ,properties and applications of vacuum microelectronic devices as well as the latest achievements in the R & D of the new device. |
| |
| Keywords: | Vacuum microelectronics Microelectronic devices Field emission |
| 本文献已被 CNKI 维普 等数据库收录！ |
