Sol—Gel法制备WO3薄膜的研究

采用络合物ｓｏｌ－ｇｅｌ浸渍提拉法以过钨酸酯的乙醇溶液为先驱制备了ＷＯ３薄膜,研究了有机添加剂草酸对膜结构的影响,并对所得薄膜进行了红外光谱、可见光谱和ＳＥＭ等测试和观察。结果表明该法能制得质量好的ＷＯ３薄膜,在溶液中加入草酸可以有效地控制裂纹扩展。因此在优化工艺条件后将能得到无裂纹的ＷＯ３薄膜。

Preparation of WO 3 Thin Film via Sol-gel Processing

WO 3 thin films were prepared from the mixture solution of the peroxotungstic ester derivative and anhydrous ethanol by sol-gel dip-coating method.The analysis of TG,DTA,IR,Visible spectra and SEM of the thin films and the precursor were carried out.The results indicate that WO 3 thin films can be prepared out by this way,crack of the films can be decreased greatly by introducing oxalic acid into the precursor solution.Thus,the WO 3 thin films with free-crack should be obtained by this way after the technique is optimized.