| 宽束射频离子源匹配网络 |
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| 引用本文： | 马利民,尤大伟,巴德纯.宽束射频离子源匹配网络[J].真空,2006,43(5):50-52. |
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| 作者姓名： | 马利民 尤大伟 巴德纯 |
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| 作者单位： | 1. 东北大学真空与流体研究中心,辽宁,沈阳,110004
2. 中国科学院空间科学与应用研究中心,北京,100080 |
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| 摘 要： | 介绍宽束射频离子源原理及结构，分析射频匹配网络中调谐和负载电容与输入频率、离子源电阻、传输线特征阻抗、支路电感的关系，导出了射频离子源阻抗公式。
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| 关 键 词： | 射频离子源 匹配网络 阻抗 |
| 文章编号： | 1002-0322（2006）05-0050-03 |
| 收稿时间： | 2006-02-23 |
| 修稿时间： | 2006-02-23 |
Network matching broad-beam RF ion source |
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| MA Li-min,YOU Da-wei,BA De-chun.Network matching broad-beam RF ion source[J].Vacuum,2006,43(5):50-52. |
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| Authors: | MA Li-min YOU Da-wei BA De-chun |
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| Affiliation: | 1. Vacuum and Fluid Engineering, Research Center, Northeastern University, Shenyang 110004,China; 2. Space Science and Application Research Center CAS , Beijing 100080, China |
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| Abstract: | Introduces the formation principle and construction of board-beam RF ion source. Discusses the relationships of tuning and load capicitance to frequency input, resistance of ion source, characteristic impedance of power lines and branch inductance in the network that matches the ion source. A formula of equivalent impedance of RF ion soure is therefore derived. |
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| Keywords: | RF ion source matching network impedance |
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