| Abstract: | A new digital filter method has been developed for enhancement of detail recognition in SEM images of high signal-to-noise ratio using an on-line digital image processing system. The filter allows an automated improvement of the presentation of SEM image information and utilizes a median filter of very large mask size and histogram equalization. Since the method can be performed without input of any processing parameters, the user simply pushes a button for obtaining the processing result similar to conventional photo recording. The method utilizes digital signal processors for establishing high speed, hence, the processing results can be immediately assessed. When Applied to a variety of field-emission SEM images, there were no problems with inconvenient artifact encountered. |
